NIST logo

Publications Portal

You searched on:
Author: charles tarrio
Sorted by: date

Displaying records 11 to 20 of 96 records.
Resort by: Date / Title


11. Narrow band EUV multilayer coating for the MOSES rocket,
Published: 1/1/2006
Authors: S M Owens, J S Gum, Charles S Tarrio, S Grantham, J A Dvorak, B Kjornrattanawanich, R Keski kuha, R J Thomas, C C Kankelborg
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100181

12. EUV component and system characterization at NIST for the support of extreme-ultraviolet lithography, ed. by R.S. Mackay
Published: 5/13/2005
Authors: S Grantham, Shannon Bradley Hill, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100159

13. Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing
Published: 5/1/2005
Authors: Charles S Tarrio, Steven E Grantham
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840203

14. A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline
Published: 4/1/2005
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, K Liu
Abstract: Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840198

15. A simple transfer-optics system for an extreme-ultraviolet synchrotron beamline,
Published: 1/1/2005
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, K Liu
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101759

16. A synchrotron beamline for extreme-ultraviolet multilayer mirror testing,
Published: 1/1/2005
Authors: Charles S Tarrio, Steven E Grantham
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101760

17. Optics go to extremes in EUV lithography
Published: 1/1/2005
Authors: Steven E Grantham, Charles S Tarrio, Shannon Bradley Hill, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101546

18. Improved Radiometry For Extreme-Ultraviolet Lithography
Published: 11/1/2004
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, K Liu, Thomas B Lucatorto, Ping-Shine Shaw
Abstract: The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840173

19. Extreme-Ultraviolet Efficiency Measurements of Freestanding Transmission Gratings
Published: 7/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
Abstract: We report the results of transmission and diffraction measurements at EUV wavelengths (4-30 nm) for two gratings, one with a line density of 5000 mm^u-1^ and the other 2500 mm^u-1^. Measurements were made to provide absolute transmission efficiency ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840108

20. Extreme-ultraviolet radiation transmission and diffraction measurements of freestanding transmission gratings,
Published: 1/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101634



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series