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Displaying records 21 to 30 of 73 records.
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21. Frontiers of Analytical Metrology for the Silicon Semiconductor Industry
Published: 2/1/2001
Authors: Thomas J. Shaffner, David G Seiler
Abstract: The grand challenges of the National Technology Roadmap for Semiconductors include affordable scaling, new materials and structures, and yield and reliability. While these encapsulate the high-level perspective and needs of the industry as a whole, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=18732

22. Challenges of Metrology and Characterization Measurements for ULSI Technology
Published: 1/1/2001
Authors: David G Seiler, Thomas J. Shaffner
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30333

23. Do We Need a Roadmap?
Published: 4/1/1999
Authors: Herbert S Bennett, Joseph G. Pellegrino, D. L. Rode, Thomas J. Shaffner, David G Seiler
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=19552

24. Characterization and Metrology for ULSI Technology
Published: 11/1/1998
Authors: David G Seiler, Alain C. Diebold, W M Bullis, Thomas J. Shaffner, R. C. McDonald, E. J. Walters
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=1561

25. Proceedings of the Fourth International Conference on Materials and Process Characterization for VLSI
Published: 12/1/1997
Authors: X. F. Zong, David G Seiler, L. G. Song
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=17326

26. Determination of Densities and Mobilities of Heavy and Light Holes in P-Type Si Using Reduced-Conductivity-Tensor Analyses of Magnetic-Field Dependent Hall and Resistivity Measurements
Published: 12/31/1996
Authors: Jin S. Kim, David G Seiler, James R. Ehrstein
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=25755

27. Electrical Characterization of Very-Narrow-Gap Bulk HgCdTe Single Crystals by Variable Magnetic-Field-Hall Measurements
Published: 12/31/1996
Authors: Jin S. Kim, David G Seiler, R. A. Lancaster, M. B. Reine
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28525

28. Quantum Conductance Fluctuations in a New Size-Scale Regime
Published: 5/5/1996
Authors: Curt A Richter, David G Seiler, Joseph G. Pellegrino
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=4443

29. Characterization of Two-Dimensional Dopant Profiles: Status and Review
Published: 2/1/1996
Authors: Alain C. Diebold, M. Kump, Joseph J Kopanski, David G Seiler
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28378

30. Semiconductor Characterization: Present Status and Future Needs
Published: 1/3/1996
Authors: W M Bullis, David G Seiler, A C Diebold
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908415