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Displaying records 21 to 30 of 134 records.
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21. Inductively Coupled Plasmas in Low Global Warming Potential Gases
Published: 8/1/2000
Authors: Amanda N Goyettes, Yicheng Wang, James K Olthoff
Abstract: Many high density discharges used in microelectronics fabrication use fluorocarbon gases with coincidentally high global-warming potentials (GWPs). We have determined the identities, fluxes, and energy distributions of ions produced in high density d ...

22. Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges
Published: 3/1/2000
Authors: Yicheng Wang, Eric C Benck, Martin Misakian, M. Edamura, James K Olthoff
Abstract: In pulse-modulated inductively coupled plasmas generated in CF^d4^:Ar mixtures, a transition between a capacitive coupling mode (E mode) and an inductive coupling mode (H mode) was observed. For a pulsed plasma in a 50%CF^d4^:50%Ar volume mixture wi ...

23. Electron Interactions With SF^d6^
Published: 1/1/2000
Authors: Loucas G. Christophorou, James K Olthoff
Abstract: Sulfur hexafluoride (SF^d6^) is commonly used as a gaseous dielectric and as a plasma etching gas. In this work, the state of knowledge on electron-interaction cross sections and electron-swarm parameters in SF^d6^ is comprehensively reviewed and c ...

24. Electron Interactions with CF^d3^I
Series: J. Phys. & Chem. Ref. Data (JPCRD)
Published: 1/1/2000
Authors: Loucas G. Christophorou, James K Olthoff
Abstract: Low-energy electron collision data for the plasma processing gas CF^d3^I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment processes. ...

25. Electron Interactions with Plasma Processing Gases: An Update for CF^d4^, CHF^d3^, C^d2^F^d6^ and C^d3^F^d8^
Published: 12/1/1999
Authors: Loucas G. Christophorou, James K Olthoff
Abstract: An update of electron-collision cross sections and electron transport parameters is presented for CF^d4^, CHF^d3^, C^d2^F^d6^, and C^d3^F^d8^.

26. Ion-Molecule Reactions and Ion Energies in CF^d4^ Discharges
Published: 12/1/1999
Authors: B. Peko, I. V. Dyakov, R. Champion, MVVS. Rao, James K Olthoff
Abstract: Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF^d4^) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dis ...

27. Boltzmann Analysis of Electron Swarm Parameters in CF^d4^ Using Independently Assessed Electron-Collision Cross Sections
Published: 10/1/1999
Authors: M. C. Bordage, P. Segur, Loucas G. Christophorou, James K Olthoff
Abstract: Using independently assessed electron-collision cross sections, electron swarm parameters were calculated via the solution of the Boltzmann equation under the hydrodynamic regime. The cross sections used for the calculations were from a previously p ...

28. Electron Collision Cross Sections Derived from Critically Assessed Data
Published: 7/1/1999
Authors: Loucas G. Christophorou, James K Olthoff
Abstract: Electron-molecule collisions are among the most fundamental processes in gas discharges. They are also the precursors of the ions and the radicals which drive the etch, cleaning, or deposition processes in plasma reactors. Hence, there is a need fo ...

29. Negative Ion-Neutral Reactions in Townsend Discharges
Published: 7/1/1999
Authors: James K Olthoff, MVVS. Rao
Abstract: Relative intensities and translational ion-flux energy distributions are presented for negative ions sampled from Townsend discharges in O^d2^, SF^d6^, and CF^d4^ for a high range of density reduced electric fields greater than 2 W 10^u-18^ V m^u2^ ( ...

30. Studies of Ion Bombardment in High Density Plasmas Containing CF^d4^
Published: 7/1/1999
Authors: James K Olthoff, Yicheng Wang
Abstract: We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure ...

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