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Author: thomas lucatorto
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Displaying records 11 to 20 of 109 records.
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11. At-Wavelength Metrology for EUV Lithography at NIST
Published: 7/14/2009
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, Thomas B Lucatorto
Abstract: The National Institute of Standards and Technology (NIST) is active in many areas of metrology impacting extreme ultraviolet lithography. We will describe our activities in the areas of reflectometry, pulsed radiometry, and long-term multiplayer mir ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841693

12. Characterisation of the Response of Chromium-Doped Alumina Screens in the Vacuum Ultraviolet Using Synchrotron Radiation
Published: 12/1/2002
Authors: James K McCarthy, A Baciero, B Zurro, Uwe Arp, Charles S Tarrio, Thomas B Lucatorto, A Morono, P Martin, E R Hodgson
Abstract: We have measured the response of chromium-doped alumina screens to vacuum ultraviolet radiation and derived quantum efficiency curves for the energy range from 30 to 300 eV. A model is presented to explain the structure in this curve. In addition, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840027

13. Characterization of Materials Using an Ultraviolet Radiometric Beamline at SURF III
Published: 1/1/2000
Authors: Ping-Shine Shaw, R Gupta, Thomas Avery Germer, Uwe Arp, Thomas B Lucatorto, Keith R Lykke
Abstract: The completion of the upgrade of the synchrotron facilities at the National Institute of Standards and Technology (NIST) has yielded a better-characterization broadband source of ultraviolet (UV) radiation at the Synchrotron Ultraviolet Radiation Fa ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841389

14. Characterization of Materials using UV Radiometric Beamline at SURF III
Published: 1/1/2000
Authors: Ping-Shine Shaw, R Gupta, Thomas Avery Germer, Uwe Arp, Thomas B Lucatorto, Keith R Lykke
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104166

15. Characterization of materials using an ultraviolet radiometric beamline at SURF III,
Published: 1/1/2000
Authors: Ping-Shine Shaw, R Gupta, Thomas Avery Germer, Uwe Arp, Thomas B Lucatorto, Keith R Lykke
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101715

16. Characterization of the Coherent Microwave Emission From the Surf II Synchrotron Storage Ring
Published: 7/1/1997
Authors: Gerald T Fraser, Angela R Hight Walker, Thomas B Lucatorto, Uwe Arp, K. K. Lehmann
Abstract: The temporal profile and frequency spectrum of the microwave emission from the Synchrotron Ultraviolet Radiation Facility [SURF II] electron storage ring at the National Institute of Standards and Technology have been studied to access the utility of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841229

17. Characterization of the response of chromium-doped alumina screens in the vacuum ultraviolet using synchrotron radiation,
Published: 1/1/2002
Authors: James K McCarthy, A Baciero, B Zurro, Uwe Arp, Charles S Tarrio, Thomas B Lucatorto, A Morono, P Martin, E R Hodgson
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101617

18. Comment on: Two-Photon Absorption Series of Calcium,
Published: 1/1/1995
Authors: J R Krumrine, Arlene Musgrove, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101592

19. Configuration-Dependent AC Stark Shifts in Calcium
Published: 1/1/1992
Authors: Q Li, Thomas R. O'Brian, Thomas B Lucatorto, T J McIlrath
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101608

20. Design considerations for a cascaded grating interferometer suitable for EUV interference lithography
Published: 4/10/2009
Authors: Zachary H Levine, Thomas B Lucatorto, Steven E Grantham
Abstract: The potential of a cascaded grating interferometer to perform Extreme Ultraviolet Interference Lithography (EUV-IL) depends on its beng coupled to a source that is bright enought to allow exposures ina reasonable time.   This work presents a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842467



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