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Author: thomas lucatorto
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Displaying records 91 to 100 of 108 records.
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91. The New NIST/DARPA National Soft X-Ray Reflectometry Facility,
Published: 1/1/1994
Authors: Charles S Tarrio, R N. Watts, Thomas B Lucatorto, M Haass, T A Callcott, J J Jia
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101765

92. The New UV Radiometry Facility at SURF
Published: 3/1/2002
Authors: Ping-Shine Shaw, Keith R Lykke, R Gupta, Uwe Arp, Thomas B Lucatorto, Albert C Parr
Abstract: The Synchrotron Ultraviolet Radiation Facility (SURF III) at the National Institute of Standards and Technology (NIST) provides a unique opportunity for high-accuracy VUV to visible radiometry with the completion of a recent upgrade to improve the un ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841980

93. Tomography of Integrated Circuit Interconnect With an Electromigration Void
Published: 5/1/2000
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: An integrated circuit interconnect was subject to accelerated-life conditions to induce an electromigration void. The silicon substrate was removed, leaving only the interconnect encased test structure encased in silica. We imaged the sample wit ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840087

94. Tomography of Integrated Circuit Interconnects
Published: 10/1/2001
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: 00 Word summary based on the paper:Z. H. Levine, A. R. Kalukin, M. Kuhn, S. P. Frigo, I. McNulty,>C. C. Retsch, Y. Wang, U. Arp, T. B. Lucatorto, B. D. Ravel, and C. Tarrio,>``Microtomography of Integrated Circuit Interconnect with an> Electromigra ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840113

95. Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography
Series: Journal of Research (NIST JRES)
Published: 7/1/2003
Authors: Charles S Tarrio, S Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
Abstract: Currently the most demanding application of extreme ultraviolet optics is connected with the development of extreme ultraviolet lithography. Not only does each of the Mo/Si multilayer EUV stepper mirrors require the highest attainable reflectivity a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841623

96. Towards high accuracy reflectometry for extreme-ultraviolet lithography,
Published: 1/1/2003
Authors: Charles S Tarrio, Steven E Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101861

97. Tracking down sources of carbon contamination in EUVL exposure tools
Published: 8/3/2009
Authors: Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto, R. Caudillo
Abstract: Optics in EUVL exposure tools are known to suffer reflectivity degradation, mostly from the buildup of carbon. The sources of this carbon have been difficult to identify. Vacuum cleanliness is normally monitored with a residual gas analyzer, but th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901665

98. UV Radiometry with Synchrotron Radiation and Cryogenic Radiometry,
Published: 1/1/1999
Authors: Ping-Shine Shaw, Keith R Lykke, R Gupta, Thomas R. O'Brian, Uwe Arp, H H White, Thomas B Lucatorto, J L Dehmer, Albert C Parr
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101716

99. UV radiometry using synchrotron radiation and absolute cryogenic radiometry
Published: 1/1/1999
Authors: Ping-Shine Shaw, Keith R Lykke, R Gupta, Thomas R. O'Brian, Uwe Arp, H H White, Thomas B Lucatorto, J L Dehmer, Albert C Parr
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104742

100. Ultraviolet Radiometry With Synchrotron Radiation and Cryogenic Radiometer
Published: 1/1/1999
Authors: Ping-Shine Shaw, Keith R Lykke, Thomas R. O'Brian, Arp Uwe, H H White, Thomas B Lucatorto, J L Dehmer, Albert C Parr, R Gupta
Abstract: The combination of a cryogenic radiometer and synchrotron radiation enablesdetector scale realization in spectral regions that are otherwise difficult to access. Cryogenic radiometry is the most accurate primary detector-based standard available to d ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841281



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