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Author: simon kaplan
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71. Optical Properties of Fluids For 248 nm and 193 nm Immersion Photolithography
Published: Date unknown
Authors: Simon Grant Kaplan, John H. Burnett
Abstract: We present measured values of the refractive index, thermo-optic coefficient, and absorption coefficient of a number of common organic solvents and aqueous inorganic solutions that may have application in immersion photolithography at 248 nm or 193 n ...

72. Problems Posed by Scattering Transmissive Materials for Accurate Transmittance and Reflectance Measurements
Published: Date unknown
Authors: Leonard M Hanssen, Simon Grant Kaplan
Abstract: The characterization of the spectral transmittance and reflectance of windows and other optical components is a basic and important measurement. In principal, the measurements are relatively straightforward. However, even with an ideal high-accurac ...

73. Thermal, Structural, and Optical Properties of Multispectral Zinc Sulfide
Published: Date unknown
Authors: L Henneman, L LaCroix, C Wilson, S Kurzius, D C Harris, M Baronowski, B Burns, K Kitagawa, J Gembarovic, S Goodrich, Leonard M Hanssen, Simon Grant Kaplan, C Staats, J Mecholsky
Abstract: Lockheed Martin Space Systems Company (LMSSC) and Vicus Technologies have conducted a study to obtain the thermal, structural and optical property data required to predict the flight performance of Multispectral Zinc Sulfide (MS ZnS) windows. The Nav ...

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