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Author: simon kaplan
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71. Optical Properties of Fluids For 248 nm and 193 nm Immersion Photolithography
Simon Grant Kaplan, John H. Burnett
We present measured values of the refractive index, thermo-optic coefficient, and absorption coefficient of a number of common organic solvents and aqueous inorganic solutions that may have application in immersion photolithography at 248 nm or 193 n ...
72. Problems Posed by Scattering Transmissive Materials for Accurate Transmittance and Reflectance Measurements
Leonard M Hanssen, Simon Grant Kaplan
The characterization of the spectral transmittance and reflectance of windows and other optical components is a basic and important measurement. In principal, the measurements are relatively straightforward. However, even with an ideal high-accurac ...
73. Thermal, Structural, and Optical Properties of Multispectral Zinc Sulfide
L Henneman, L LaCroix, C Wilson, S Kurzius, D C Harris, M Baronowski, B Burns, K Kitagawa, J Gembarovic, S Goodrich, Leonard M Hanssen, Simon Grant Kaplan, C Staats, J Mecholsky
Lockheed Martin Space Systems Company (LMSSC) and Vicus Technologies have conducted a study to obtain the thermal, structural and optical property data required to predict the flight performance of Multispectral Zinc Sulfide (MS ZnS) windows. The Nav ...