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Author: quandou wang

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21. Interferometric Thickness Calibration of 300mm Silicon Wafers
Published: 7/20/2005
Authors: Quandou Wang, Ulf Griesmann, Robert S. Polvani
Abstract: The Improved Infrared Interferometer (IR3) at the National Institute of Standards and Technology (NIST) is a phase-measuring interferometer, operating at a wavelength of 1550 nm, which is being developed for measuring the thickness and thickness vari ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822291

22. Optical Flatness Metrology for 300 mm Silicon Wafers
Published: 4/1/2005
Authors: Ulf Griesmann, Quandou Wang, T D Raymond
Abstract: At the National Institute of Standards and Technology (NIST), we are developing two interferometric methods for measuring the thickness variation and flatness of free-standing and chucked silicon wafers with diameters up to 300mm. The eXtremely accu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822272

23. A Simple Ball Averager for Reference Sphere Calibrations
Published: 1/1/2005
Authors: Ulf Griesmann, Quandou Wang, Johannes A Soons, Remi Carakos
Abstract: When measuring the form errors of precision optics with an interferometer, the calibration of the reference wavefront is of central importance.  Ball averaging, or random ball testing, has in recent years emerged as a robust method for calibrati ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822303

24. Characterization of Precision Spheres With XCALIBIR
Published: 1/1/2004
Authors: Ulf Griesmann, Johannes A Soons, Quandou Wang
Abstract: The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius-of-curvature at one point and the deviation from the perfect spherical form at all other points of the sphere. Measurements of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822216

25. Measuring Form and Radius of Spheres With Interferometry
Published: 1/1/2004
Authors: Quandou Wang, Johannes A Soons, Ulf Griesmann
Abstract: The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius of curvature at one point and deviation from the perfect spherical form at all other points of the sphere. Measurements of radi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822167

26. Integrating Active Tangible Devices With a Synthetic Environment for Collaborative Engineering
Published: 2/1/2001
Authors: Sanford P Ressler, Brian Antonishek, Quandou Wang, Afzal A Godil
Abstract: This paper describes the creation of an environment for collaborative engineering. in which the goal is to improve the user interface by using haptic manipulation with synthetic environments. We have integrated a multi-user synthetic environment with ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=151503

27. When Worlds Collide - Interactions Between the Virtual and the Real
Published: 2/1/2001
Authors: Sanford P Ressler, Brian Antonishek, Quandou Wang, Afzal A Godil, Keith A Stouffer
Abstract: This paper explores issues surrounding interaction with virtual (computer generated) objects which are interfaced to real world devices. In addition a virtual room corresponding to a real physical room has been created to allow collaborative meetings ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=151427

28. Using Numerical Grid Generation to Facilitate 3D Visualization of Complicated Mathematical Functions
Report Number: 6413
Published: 11/1/1999
Authors: Bonita V Saunders, Quandou Wang
Abstract: Although virtually unchanged since its initial publication in 1964, the National Bureau of Standards (NBS) Handbook of Mathematical Functions continues to be widely used by the mathematical and scientific community. As a result, the National Institut ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=150773

29. A VRML Integration Methodology for Manufacturing Applications
Published: 8/24/1998
Authors: Sanford P Ressler, Afzal A Godil, Quandou Wang, G S Seidman
Abstract: This paper describes several methods for using the Virtual Reality Modeling Language (VRML) as the visualization integration tech-nology for manufacturing simulation systems. One of our goals was to develop an integration methodology based on the use ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=151383

30. Manufacture of Extremely Flat 300 mm Silicon Wafers
Published: Date unknown
Authors: Marc Tricard, Paul Dumas, Christopher Hall, Ulf Griesmann, Quandou Wang
Abstract: The flatness requirement for silicon wafers at the exposure site will be lower than 50 nm by 2010 and may be as low as 25nm by 2015 (TRS 2005).  This creates new challenges for both wafer polishing and metrology tools capable of meeting the spec ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823340



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