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Author: quandou wang

Displaying records 11 to 20 of 30 records.
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11. A Simple Method to Improve Etching Uniformity when Making Phase Type CGHs on a Thick Glass Substrate
Published: 6/13/2010
Author: Quandou Wang
Abstract: A simple method to optimize the etching uniformity when making a Computer generated halogram on a thick optical glass substrate is described, which uses a Teflon ring to enclose the substrate during reactive-ion etching (RIE).
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905044

12. Deformation-Free Form Error Measurements of Thin, Plane-Parallel Optics Floated on a Heavy Liquid
Published: 4/1/2010
Authors: JiYoung Chu, Ulf Griesmann, Quandou Wang, Johannes A Soons, Eric C Benck
Abstract: We describe a novel method for measuring the unconstrained flatness error of thin, plane parallel precision optics by floating them on high-density aqueous metatungstate solutions while measuring the flatness error with an interferometer. The supp ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=904728

13. Radius Measurement of Spherical Surfaces With Large Radii-of-Curvature Using Dual-Focus Zone Plates
Published: 10/20/2008
Authors: Quandou Wang, Guangjun Gao, Ulf Griesmann
Abstract: The measurement of spherical surface radii exceeding a few meters presents a challenge, because the familiar radius-bench method requires large part displacements. Dual-focus zone plates can extend the radius-bench method to measurements of large rad ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824680

14. Measuring the Phase Transfer Function of a Phase-Shifting Interferometer
Published: 8/13/2008
Authors: JiYoung Chu, Quandou Wang, John P. Lehan, Ulf Griesmann, Guangjun Gao
Abstract: In characterizing the performance of a phase-shifting interferometer, the dependence of the measured height on the spatial frequency is rarely considered. We describe a test mirror with a special height relief that can be used to measure the height t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824685

15. Stationary and non-stationary deformations in three-flat tests
Published: 7/7/2008
Authors: Ulf Griesmann, Quandou Wang, Nicolas Laurenchet, Johannes A Soons
Abstract: Calibration procedures for optical reference flats of phase-shifting interferometers (three-flat tests) are critically important if flatness measurements with low uncertainty are desired. In these tests, all combinations of three flats with unknown f ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824679

16. Three-Flat Test Solutions Including Mounting-Induced Deformations
Published: 9/1/2007
Authors: Ulf Griesmann, Quandou Wang, Johannes A Soons
Abstract: We investigate three-flat calibration methods for circular flats, based on rotation symmetry and mirror symmetry, for absolute interferometric flatness measurements in the presence of deformations caused by the support mechanism for the flats, which ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823338

17. Manufacture and Metrology of 300 mm Silicon Wafers with Ultra-Low Thickness Variations
Report Number: 823030
Published: 1/2/2007
Authors: Ulf Griesmann, Quandou Wang, Marc Tricard, Paul Dumas, Christopher Hill
Abstract: With the evolution of exposure tools for optical lithography towards larger numerical apertures, the semiconductor industry expects continued demand for improved wafer flatness at the exposure site. The Allowable site flatness for 300 mm wafers is ex ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823030

18. Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine
Published: 1/1/2006
Authors: Quandou Wang, Ulf Griesmann
Abstract: We describe the design of a miniature Fizeau interferometer, which is intended to be an accurate curvature sensor for the NIST Geometry Measuring (GEMM), which is used to measure aspheric and free form surfaces. The interferometer was designed for s ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822280

19. A Tool Kit to Generate 3D Animated CAESAR Bodies
Published: 10/1/2005
Authors: Quandou Wang, Sanford P Ressler
Abstract: The Civilian American and European Surface Anthropometry Resource (CAESAR) database provides a comprehensive source for body measurement in numerous industries such as apparel, aerospace, and automobile. Generating animated CAESAR body sequences fro ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=150282

20. Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST
Published: 7/31/2005
Authors: Ulf Griesmann, Nadia Machkour-Deshayes, Byoung Chang Kim, Quandou Wang, Lahsen Assoufid
Abstract: The Geometry Measuring Machine (GEMM) of the National Institute of Standards and Technology (NIST) is a profilometer for free-form surfaces. A profile is reconstructed from local curvature of a test part surface, measured at several locations along ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822308



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