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You searched on: Author: theodore vorburger

Displaying records 181 to 190 of 204 records.
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181. An Instrument for Calibrating Atomic Force Microscope Standards
Published: 5/1/1994
Authors: J Schneir, T Mcwaid, Theodore Vincent Vorburger
Abstract: To facilitate the use of AFMs for manufacturing we have initiated a project to develop and calibrate artifacts which can in turn be used to calibrate a commercial AFM so that subsequent AFM measurement are accurate and traceable back to the wavelengt ...

182. The Measurement and Uncertainty of a Calibration Standard for the SEM
Published: 3/1/1994
Authors: Joseph Fu, M Croarkin, Theodore Vincent Vorburger
Abstract: Standard Reference Material 484 is an artifact for calibration the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000X to 20000X. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and ...

183. A Calibrated Atomic Force Microscope
Published: 1/1/1994
Authors: T Mcwaid, J Schneir, Theodore Vincent Vorburger
Abstract: Abstract not available.

184. In Situ Tip Characterization for AFM and Application to Linewidth Metrology
Published: 1/1/1994
Authors: Ronald G Dixson, J Schneir, T Mcwaid, Theodore Vincent Vorburger
Abstract: Abstract not available.

185. Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features
Published: 1/1/1994
Authors: T Mcwaid, Theodore Vincent Vorburger, Joseph Fu, Jun-Feng Song, Eric Paul Whitenton
Abstract: Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric microscope. The differences between measurements of the same surface feature as obtained with ...

186. Microform Calibrations in Surface Metrology
Published: 1/1/1994
Authors: Jun-Feng Song, F Rudder, Theodore Vincent Vorburger, A Hartman, Brian R Scace, J Smith
Abstract: Microform calibrations include the measurement of complex profile forms and position errors of micrometer scale in combination with the measurement of deviations from a specified profile and surface texture of profile segments. Tolerances on the prof ...

187. Strategy for Post-Process Control of a Machine Tool
Published: 1/1/1994
Authors: Theodore Vincent Vorburger, K Yee, Brian R Scace, F Rudder
Abstract: The automated control of machine-tool accuracy is discussed based on a quality architecture containing three control loops: real-time, process-intermittent, and post-process. This paper highlights the post-process loop. The architecture is being impl ...

188. The Geometric Characterization of Rockwell Diamond Indenters
Published: 1/1/1994
Authors: Jun-Feng Song, F Rudder, Theodore Vincent Vorburger, A Hartman, Brian R Scace, J Smith
Abstract: By using a stylus instrument, a series of calibration and check standards, and calibration and uncertainty calculation procedures, we have calibrated Rockwell diamond indenters with a traceability to fundamental measurements. The combined measurement ...

189. Proposed Coating Technology Consortium
Published: 4/1/1993
Author: Theodore Vincent Vorburger
Abstract: Abstract not available.

190. Regimes of Surface Roughness Measurable with Light Scattering
Published: 1/1/1993
Authors: Theodore Vincent Vorburger, Egon Marx, T Lettieri
Abstract: In this paper we summarize a number of previous experiments on the measurement of the roughness of metallic surfaces by light scattering. We identify several regimes that permit measurement of different surface parameters and functions, and we establ ...

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  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
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