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Author: theodore vorburger

Displaying records 161 to 170 of 202 records.
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161. Industrial Uses of STM and AFM
Published: 1/1/1997
Authors: Theodore Vincent Vorburger, John A Dagata, G. Wilkening, K Iizuka
Abstract: We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applica ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820882

162. Measurement Comparison of Stylus Radii
Published: 1/1/1997
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: Three methods were used for measuring the radii of the same stylus of our stylus instrument. The measurement results were compared and showed good agreement. Using razor blade tracing, the stylus radius was measured as r=1.60um with an expanded uncer ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820877

163. Pitch and Step Height Measurements Using NIST
Published: 1/1/1997
Authors: R Koning, Ronald G Dixson, Joseph Fu, V W. Tsai, Theodore Vincent Vorburger, Edwin Ross Williams, X Wang
Abstract: The use of the atomic force microscope (AFM) for step height and pitch measurements in industrial applications is rapidly increasing. To compare the results obtained by different instruments and to achieve high accuracy, the scales of an AFM must be ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820847

164. Stylus-Laser Surface Calibration System
Published: 10/1/1996
Authors: Theodore Vincent Vorburger, Jun-Feng Song, T Giauque, Thomas B Renegar, Eric Paul Whitenton, M Croarkin
Abstract: A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820830

165. Calibration of Scanning Electron Microscope Magnification Standards SRM-484
Published: 5/1/1996
Authors: Joseph Fu, Theodore Vincent Vorburger, D Ballard
Abstract: Standard Reference Material (SRM) 484 is an artifact for calibrating the magnification scale of a scanning electron microscope. Since 1977 the National Institute of Standards and Technology (NIST) has produced seven issues of SRM484 amounting to app ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820793

166. Height Calibration of Atomic Force Microscopes Using Silicon Atomic Step Artifacts
Published: 1/1/1996
Authors: V W. Tsai, Theodore Vincent Vorburger, P Sullivan, Ronald G Dixson, Richard M Silver, Edwin Ross Williams, J Schneir
Abstract: The decreasing feature dimensions required in the semiconductor manufacturing industry are placing ever increasing demands upon metrology instruments. Atomic force microscopes (AFMs), which can have ~1 nm lateral resolution and sub-angstrom vertical ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820827

167. Standard Grade Rockwell Diamond Indenters - A Key to a Worldwide Unified Rockwell Hardness Scale
Published: 1/1/1996
Authors: Jun-Feng Song, Samuel Rea Low III, David J Pitchure, Theodore Vincent Vorburger
Abstract: Since the 1980's, the European Community (EC) has established a unified Rockwell C hardness (HRC) scale by averaging several national scales, which come from each country''s national hardness machines and diamond indenters. These indenter ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820820

168. Standard Grade Rockwell Diamond Indenters - A Key to a Worldwide Unified Rockwell Hardness Scale (in Japanese)
Published: 1/1/1996
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: Since the 1980''s, the European Community (EC) has established a unified Rockwell C hardness (HRC) scale by averaging several national scales, which come from each country''s national hardness machines and diamond indenters. These ind ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820997

169. Stylus Flight in Surface Profiling
Published: 1/1/1996
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: In this paper, theoretical and experimental work on stylus flight is described. Experiments on the surfaces of different roughness specimens with sinusoidal, rectangular, triangular and random waveforms support the theoretical model, which predicts s ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820821

170. Toward Accurate Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated AFM
Published: 1/1/1996
Authors: Ronald G Dixson, Theodore Vincent Vorburger, P Sullivan, V W. Tsai, T Mcwaid
Abstract: Atomic force microscope (AFM) measurements are being used increasingly for metrological applications such as semiconductor process development and control. Common types of measurements are those of feature spacing (pitch), feature height (or depth), ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820790



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