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1. 10 nm Three-Dimensional CD-SEM Metrology
Published: 4/10/2014
Authors: Andras Vladar, John S Villarrubia, Bin Ming, Regis J Kline, Jasmeet Chawla, Scott List
Abstract: The shape and dimensions of a challenging pattern have been measured using a model-based library scanning electron microscope (MBL SEM) technique. The sample consisted of a 4-line repeating pattern. Lines were narrow (10 nm), asymmetric (different ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915705

2. A New Way of Handling Dimensional Meaurement Results for Integrated Circuit Technology
Published: 6/1/2003
Authors: Andras Vladar, John S Villarrubia, Michael T Postek
Abstract: The international guidelines for correct expression of measurement results and errors call for a through assessment of the errors, their origin and behavior. The various dimensional measurement methods have different types of errors, different signa ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823159

3. A Simulation Study of Repeatability and Bias in the CD-SEM
Published: 5/1/2003
Authors: John S Villarrubia, Andras Vladar, Michael T Postek
Abstract: The ability of a critical dimension scanning electron microscope (CD-SEM) to resolve differences in the widths of two lines is determined by measurement repeatability and any sample-dependent biases. In order to ascertain the dependence of these quan ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822375

4. A Simulation Study of Repeatability and Bias in the CD-SEM
Published: 7/1/2005
Authors: John S Villarrubia, Andras Vladar, Michael T Postek
Abstract: Abstract: The ability of a critical dimension scanning electron microscope (CD-SEM) to resolve differences in the widths of two lines depends on the instrument?s measurement repeatability and any sample dependent biases. The dependence of repeatabil ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822536

5. A Strategy for Faster Blind Reconstruction of Tip Geometry for Scanned Probe Microscopy
Published: 3/1/1999
Author: John S Villarrubia
Abstract: In scanned probe microscopy, it is necessary to know the tip's geometry in order to correct image distortions due to its finite size. Heretofore, methods have focused upon determining the tip geometry by erosion of a tip characterizer of known geomet ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822529

6. A Study of the Surface Texture of Polycrystalline Phosphor Films Using AFM
Published: 1/1/1994
Authors: Zsolt Revay, J Schneir, D Brower, John S Villarrubia, Joseph Fu, et al
Abstract: Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the measurement of the surface texture of these films. Determination of the surface texture of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820709

7. Advanced Metrology Needs for Nanotechnology and Nanomanufacturing
Published: 11/1/2005
Authors: Michael T Postek, John S Villarrubia, Andras Vladar
Abstract: Advances in fundamental nanoscience, design of nanomaterials, and ultimately manufacturing of nanometer scale products all depend to some degree on the capability to accurately and reproducibly measure dimensions, properties, and performance characte ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822376

8. Advancing Nanoscale Indentation Measurements Toward Quantitative Characterization of Polymer Properties
Published: 1/1/2000
Authors: Mark R VanLandingham, John S Villarrubia, G Meyers, M Dineen
Abstract: The ultimate objective of instrumented indentation testing is to obtain absolute measurements of material properties and behavior. To achieve this goal, accurate knowledge of the shape of the indenter tip is required. For indentation measurements inv ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820986

9. Advancing Nanoscale Indentation Measurements Toward Quantitative Characterization of Polymer Properties
Published: 8/1/2000
Authors: Mark R VanLandingham, John S Villarrubia, G F Meyers, M D Dineen
Abstract: The ultimate objective of instrumented indentation testing is to obtain absolute measurements of material properties and behavior. To achieve this goal, accurate knowledge of the shape of the indenter tip is required. For indentation measurements i ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=860249

10. Algorithm for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation
Series: Journal of Research (NIST JRES)
Published: 7/1/1997
Author: John S Villarrubia
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823084



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