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Author: john villarrubia

Displaying records 71 to 80 of 89 records.
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71. Tip Characterization for Scanned Probe Microscope Width Metrology
Published: 3/1/1998
Authors: Samuel Dongmo, John S Villarrubia, Samuel N Jones, Thomas B Renegar, Michael T Postek, Jun-Feng Song
Abstract: Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823092

72. Blind Estimation of Tip Geometry in Scanned Probe Microscopy
Published: 8/1/1997
Author: John S Villarrubia
Abstract: Broadening of surface protrusions is a well-known imaging artifact in scanned probe microscope topographs. Blind reconstruction is a method for estimating the tip shape from the image of a tip characterizer, without independent knowledge of the chara ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820880

73. Algorithm for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation
Series: Journal of Research (NIST JRES)
Published: 7/1/1997
Author: John S Villarrubia
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823084

74. Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation
Published: 7/1/1997
Author: John S Villarrubia
Abstract: To the extent that tips are not perfectly sharp, images produced by scanned probe microscopies (SPM) such as atomic force microscopy and scanning tunneling microscopy are only approximations of the specimen surface. Tip-induced distortions are signif ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820879

75. Characterization of Multi-phase and Multi-component Polymers using the Atomic Force Microscope
Published: 1/1/1997
Authors: Mark R VanLandingham, John S Villarrubia, G Meyers, M Dineen
Abstract: Abstract not available.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821592

76. Experimental Results of Blind Reconstruction of STM Tips
Published: 1/1/1997
Authors: Carsten P. Jensen, Richard M Silver, John S Villarrubia
Abstract: Abstract not available.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820896

77. Tip and Surface Reconstruction in Scanned Probe Microscopy
Published: 1/1/1997
Author: John S Villarrubia
Abstract: The non-vanishing size of tips in scanned probe microscopes (e.g., atomic force microscope or scanning tunneling microscope) results in imaging errors. Correction of these errors requires estimation of the tip shape (tip reconstruction) followed by e ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820881

78. Electrical Test Structures Replicated in Silicon-on-Insulator Material
Published: 12/31/1996
Authors: Michael W Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, Loren W. Linholm, John S Villarrubia
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8218

79. Electrical Test Structures Replicated in Silicon-On-Insulator Material
Published: 5/1/1996
Authors: Michael W Cresswell, J Sniegowski, Rathindra Ghoshtagore, Robert Allen, L Linholm, John S Villarrubia
Abstract: Measurements of the linewidths of submicrometer features made by different metrology techniques have frequently been characterized by differences of up to 90 nm. The purpose of the work reported here is to address the special difficulties that this p ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820785

80. Scanned Probe Microscope Tip Characterization Without Calibrated Tip Characterizers
Published: 3/1/1996
Author: John S Villarrubia
Abstract: In scanned probe microscopy the image is a combination of information from the sample and the tip. In order to reconstruct the true surface geometry, it is necessary to know the actual tip shape. It has been proposed that this shape may be reconstruc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820829



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