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You searched on: Author: john villarrubia

Displaying records 31 to 40 of 93 records.
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31. Influence of Focus Variation on Linewidth Measurements
Published: 3/3/2005
Authors: M Tanaka, John S Villarrubia, Andras Vladar
Abstract: The influence of spatial resolution on line width measurements in the critical dimension scanning electron microscope (CD-SEM) was investigated experimentally. Measurement bias variation and measurement repeatabilities of four edge detection algorith ...

32. Issues in Line Edge and Linewidth Roughness Metrology
Published: 1/1/2005
Author: John S Villarrubia
Abstract: In semiconductor electronics applications, line edge and linewidth roughness are generally measured using a root mean square (RMS) metric. The true value of RMS roughness depends upon the length of edge or line that is measured and the chosen samplin ...

33. Scanning Electron Microscope Dimensional Metrology using a Model-based Library
Published: 1/1/2005
Authors: John S Villarrubia, Andras Vladar, Michael T Postek
Abstract: The semiconductor electronics industry places significant demands upon secondary electron imaging to obtain dimensional measurements that are used for process control or failure analysis. Tolerances for measurement uncertainty and repeatability are ...

34. Test of CD-SEM Shape-Sensitive Linewidth Measurement
Published: 7/1/2004
Authors: John S Villarrubia, Andras Vladar, Michael T Postek
Abstract: In a model-based library (MBL) approach to scanning electron microscope (SEM) linewidth measurement, a library of simulation results for a range of lineshapes is searched for a match to the measured image of the unknown line. Compared to standard alg ...

35. Determination of Optimal Parameters for CD-SEM Measurement of Line Edge Roughness
Published: 5/1/2004
Authors: B Bunday, M R Bishop, D Mccormack, John S Villarrubia, Andras Vladar, Theodore Vincent Vorburger, Ndubuisi George Orji, J Allgair
Abstract: The measurement of line-edge roughness (LER) has recently become a topic of concern in the litho-metrology community and the semiconductor industry as a whole. The Advanced Metrology Advisory Group (AMAG), a council composed of the chief metrologists ...

36. Dimensional Metrology of Resist Lines Using a SEM Model-Based Library Approach
Published: 5/1/2004
Authors: John S Villarrubia, Andras Vladar, B Bunday, M R Bishop
Abstract: The widths of 284 lines in a 193 nm resist were measured by two methods and the results compared. One method was scanning electron microscopy (SEM) of cross-sections. The other was a model-based library (MBL) approach in which top-down CD-SEM line sc ...

37. Development of Photomask Artifacts and Metrology for the 65 nm Device Generation with Extensibility Beyond
Published: 1/1/2004
Authors: Andras Vladar, Richard M Silver, James Edward Potzick, John S Villarrubia
Abstract: The purpose of this project was to explore the currently used mask metrology methods and tools, to further develop mask metrology, and to design, fabricate and measure a new, relevant, 193 nm phase shifting mask metrology mask. These tasks were succe ...

38. Shape-Sensitive Linewidth Measurements of Resist Structures
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 7089
Published: 1/1/2004
Authors: John S Villarrubia, Andras Vladar, Michael T Postek
Abstract: Widths of developed 193 nm resist lines were measured by two methods and compared. One method was a new model-based library method. In this method the scanning electron microscope (SEM) images corresponding to various edge shapes are simulated in adv ...

39. Tip Characterization for Dimensional Nanometrology
Published: 1/1/2004
Author: John S Villarrubia
Abstract: Abstract: Technological trends are increasingly requiring dimensional metrology at size scales below a micrometer. Scanning probe microscopy has unique advantages in this size regime, but width and roughness measurements must be corrected for imagin ...

40. Exploring and Extending the Limits of CD-SEMs' Resolution
Published: 11/1/2003
Authors: Andras Vladar, Michael T Postek, John S Villarrubia
Abstract: This study of SEM resolution is occasioned by concerns that it is no longer adequate for lithography process control in integrated circuit manufacturing. For example, according to the most recent International Technology Roadmap for Semiconductors, t ...

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