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Author: robert vest
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1. 40 Years of Metrology With Synchrotron Radiation at SURF
Published: 9/1/2003
Authors: Uwe Arp, Steven E Grantham, Simon Grant Kaplan, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
Abstract: the advantages of a compact synchrotron radiation source like the Synchrotron Ultraviolet Radiation Facility for metrology in the ultraviolet and extreme ultraviolet are shown. The capabilities of the different experimental stations are explained an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840164

2. A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline
Published: 4/1/2005
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, K Liu
Abstract: Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840198

3. A simple transfer-optics system for an extreme-ultraviolet synchrotron beamline,
Published: 1/1/2005
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, K Liu
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101759

4. Absolute EUV Metrology,
Published: 1/1/2001
Authors: Charles S Tarrio, Robert Edward Vest, S Grantham
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100203

5. Absolute Extreme Ultraviolet Metrology
Published: 8/1/2001
Authors: Charles S Tarrio, Robert Edward Vest, S Grantham
Abstract: NIST has a long-standing program for the calibration of extreme ultraviolet optical components. Begun with the advent of the Synchrotron Ultraviolet Radiation Facility (SURF) almost 40 years ago, early activities centered on the development and char ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840110

6. Absolute Silicon Photodiodes for 160 nm to 254 nm Photons
Published: 1/1/1998
Authors: L R Canfield, Robert Edward Vest, R Korde, H Schmidtke, R Desor
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101467

7. Absolute Silicon Photodiodes for 160 nm to 254 nm Photons
Published: 1/1/1998
Authors: L R Canfield, Robert Edward Vest, R Korde, H Schmidtke, R Desor
Abstract: Silicon n-on-p photodiodes with 100% internal efficiency have been studied in the 160 nm to 254 nm range. Preliminary values for the quantum yield of silicon, a fundamantal property, are determined. Using these values, a trap detector for absolute ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840044

8. AlGaN Schottky Diodes for Short-Wavelength UV Applications
Published: 6/1/2001
Authors: P P Chow, J J Klaassen, Robert Edward Vest, J M VanHove, A Wowchak, C Polley
Abstract: High performance ultraviolet (UV) detectors have been fabricated using plasma-enhanced molecular beam epitaxy (MBE). The realized AlGaN Schottky detectors exhibit high responsivity, sharp spectral cutoff and high shunt resistance of several giga-ohn ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840131

9. At-Wavelength Metrology for EUV Lithography at NIST
Published: 7/14/2009
Authors: Charles S Tarrio, Steven E Grantham, Robert Edward Vest, Thomas B Lucatorto
Abstract: The National Institute of Standards and Technology (NIST) is active in many areas of metrology impacting extreme ultraviolet lithography. We will describe our activities in the areas of reflectometry, pulsed radiometry, and long-term multiplayer mir ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841693

10. Constant pressure primary flow standard for gas flows from 0.01 cm^u3^/min to 100 cm^u3^/min (10^u-8^ mol/s to 10^u-5^ mol/s)
Published: 12/17/2013
Authors: Robert F Berg, Gooding Timothy, Robert Edward Vest
Abstract: We describe a flow meter for gas flows in the range from 0.01 sccm to 100 sccm with a relative standard uncertainty of 0.03 % at 1 sccm. (1 sccm ≈ 1 cm3/min of an ideal gas at 101325 Pa and 0 C ≈ 0.7 mol/s.) The flow meter calibrates a se ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914154



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