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You searched on: Author: benjamin tsai

Displaying records 71 to 80 of 100 records.
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71. Modeling Chamber Radiation Effects on Pyrometric Temperature Measurement in Rapid Thermal Processing
Published: 5/2/1999
Authors: F Rosa, Yong Zhou, Z M Zhang, D P DeWitt, Benjamin K Tsai
Abstract: A detailed analysis of the radiation environment in the lower chamber of the RTP test bed at the National Institute of Standard and Technology (NIST) is performed to improve the accuracy of radiation thermometry. The models developed in this work co ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841367

72. Chamber Radiation Effects on Calibration of Radiation Thermometers with a Thin-Film Thermocouple Test Wafer, ed. by J.F. Dubbeldam and M.J. de Groot
Published: 1/1/1999
Authors: Benjamin K Tsai, D P DeWitt, Francis John Lovas, K G Kreider, C W Meyer, David W Allen
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104792

73. Comparative Calibration of Heat Flux Sensors in Two Blackbody Facilities
Published: 1/1/1999
Authors: A V Murthy, Benjamin K Tsai, Robert D. Saunders
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104050

74. High Heat Flux Sensors Calibration in a Cooled Enclosure
Published: 1/1/1999
Authors: A V Murthy, Benjamin K Tsai, Robert D. Saunders
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104653

75. ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling
Published: 1/1/1999
Authors: Benjamin K Tsai, D P DeWitt
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104793

76. ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results
Published: 1/1/1999
Authors: C W Meyers, David W Allen, D P DeWitt, K G Kreider, Francis John Lovas, Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104616

77. Aperture Proximity Effects in High Heat Flux Sensors Calibration
Series: Journal of Research (NIST JRES)
Published: 11/1/1998
Authors: A V Murthy, Benjamin K Tsai, Robert D. Saunders
Abstract: In transfer calibration of heat flux sensors, a correction for the irradiance distribution across the sensing area may be required when the sensing areas of reference and test sensors are different. A method to calculate this correction using well k ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841297

78. Evaluation of Uncertainties in Fundamental Radiometric Measurements
Published: 10/1/1998
Authors: Benjamin K Tsai, Bettye C Johnson
Abstract: The uncertainty of measurements is critical in furthering the development of radiometric science and acquiring an increased understanding of its principles. Proper analysis of measurement uncertainties provides an indication of how well the measure ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841254

79. High Heat Flux Sensors Calibration Using Blackbody Radiation
Published: 8/1/1998
Authors: A V Murthy, Benjamin K Tsai, Robert D. Saunders
Abstract: This paper deals with the radiative calibration aspects of high heat flux sensors using blackbody radiation. Several heat flux sensors were calibrated up to 50kW/m^u2^ in the last two years using a 25 - mm diameter aperture variable temperature blac ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841234

80. RTP Calibration Wafer Using Thin-Film Thermocouples
Published: 4/1/1998
Authors: Kenneth Gruber Kreider, D P DeWitt, Benjamin K Tsai, Francis John Lovas, David W Allen
Abstract: Rapid thermal processing (RTP) is a key technology for the cluster tool, single wafer manufacturing approach that is used to produce integrated circuits at lower cost with reduced line widths and thermal budgets. However, various problems associate ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830603



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