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Author: benjamin tsai

Displaying records 61 to 70 of 95 records.
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61. ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling
Published: 1/1/1999
Authors: Benjamin K Tsai, D P DeWitt
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104793

62. ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results
Published: 1/1/1999
Authors: C W Meyers, David W Allen, D P DeWitt, K G Kreider, Francis John Lovas, Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104616

63. Aperture Proximity Effects in High Heat Flux Sensors Calibration
Series: Journal of Research (NIST JRES)
Published: 11/1/1998
Authors: A V Murthy, Benjamin K Tsai, Robert D. Saunders
Abstract: In transfer calibration of heat flux sensors, a correction for the irradiance distribution across the sensing area may be required when the sensing areas of reference and test sensors are different. A method to calculate this correction using well k ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841297

64. Evaluation of Uncertainties in Fundamental Radiometric Measurements
Published: 10/1/1998
Authors: Benjamin K Tsai, Bettye C Johnson
Abstract: The uncertainty of measurements is critical in furthering the development of radiometric science and acquiring an increased understanding of its principles. Proper analysis of measurement uncertainties provides an indication of how well the measure ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841254

65. RTP Calibration Wafer Using Thin-Film Thermocouples
Published: 4/1/1998
Authors: Kenneth Gruber Kreider, D P DeWitt, Benjamin K Tsai, Francis John Lovas, David W Allen
Abstract: Rapid thermal processing (RTP) is a key technology for the cluster tool, single wafer manufacturing approach that is used to produce integrated circuits at lower cost with reduced line widths and thermal budgets. However, various problems associate ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830603

66. Calibration Wafer for Temperature Measurement in RTP Tools
Published: 1/1/1998
Authors: K G Kreider, D P DeWitt, Benjamin K Tsai, Francis John Lovas, David W Allen
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104583

67. Developments in the New Spectral Irradiance Scale at NIST
Series: Journal of Research (NIST JRES)
Published: 1/1/1998
Author: Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104232

68. High Heat Flux Sensor Calibration using Blackbody Radiation
Published: 1/1/1998
Authors: A V Murthy, Benjamin K Tsai, Robert D. Saunders
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104051

69. Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas
Published: 1/1/1998
Authors: Francis John Lovas, Benjamin K Tsai, Charles E Gibson
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104603

70. NIST Measurement Services: Radiance Temperature Calibrations
Series: Special Publication (NIST SP)
Report Number: 250-43
Published: 1/1/1998
Authors: Charles E Gibson, Benjamin K Tsai, Albert C Parr
Abstract: This document describes the realization and dissemination of the International Temperature Scale of 1990 (ITS-90) above 700 [degrees] C at the National Institute of Standards and Technology (NIST). By using the fundamental principles of blackbody ph ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841231



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