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Author: benjamin tsai

Displaying records 21 to 30 of 96 records.
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21. Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools
Published: 9/1/2003
Authors: Kenneth Gruber Kreider, D H Chen, D P DeWitt, William Andrew Kimes, Benjamin K Tsai
Abstract: curate temperature measurements are critical in rapid thermal processing (RTP) of silicon wafers for thermal oxidation and dopant anneals. Many RTP tools use lightpipe radiation thermometers (LPRTs) to measure the wafer temperatures during processin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830853

22. Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools
Published: 9/1/2003
Authors: Kenneth Gruber Kreider, D H Chen, D P DeWitt, William Andrew Kimes, Benjamin K Tsai
Abstract: Lightpipe radiation thermometers (LPRTs) are the preferred temperature monitoring sensor in most rapid thermal processing (RTP) tools for semiconductor fabrication. These tools are used for dopant anneal, gate oxide formation, and other high temperat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830821

23. Temperature and Flux Scales for Heat-Flux Sensor Calibration
Published: 9/1/2003
Authors: A V Murthy, D P DeWitt, Benjamin K Tsai, Gerald T Fraser, Robert D. Saunders
Abstract: Methodologies for calibrating heat-flux sensors designed for direct measurement of heat-transfer at a surface are presented. These sensors, extensively used in fire-test methods and aerospace applications, vary in range from a few kW/m^u2^ to in exc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841678

24. Laboratory Apparatus for the Measurement of Optical Extinction Coefficients of Postflame Soot in the Infrared
Published: 2/1/2003
Authors: J F. Widmann, Jiann C Yang, Matthew F Bundy, Benjamin K Tsai, George William Mulholland
Abstract: An experimental apparatus for the measurement of optical extinction coefficients of postflame soot aerosol in the infrared region of the electromagnetic spectrum is presented. Reproducible soot aerosol is generated using a laminar diffusion burner, a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910128

25. Calibration of a Heat Flux Sensor up to 200 kW/m^u2^ in a Spherical Blackbody, Symp. ed. by L.A. Gritzo and N. Alvares
Published: 1/1/2003
Authors: A V Murthy, Benjamin K Tsai, Robert D. Saunders
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104649

26. Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools
Published: 1/1/2003
Authors: K G Kreider, D H Chen, W A. Kimes, D P DeWitt, Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104579

27. Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools
Published: 1/1/2003
Authors: K G Kreider, D H Chen, D P DeWitt, W A. Kimes, Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104580

28. Traceable Temperature Calibrations of Radiation Thermometers for Rapid Thermal Processing
Published: 1/1/2003
Author: Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104788

29. Effects of Wafer Emissivity on Rapid Thermal Processing Temperature Measurement
Published: 9/1/2002
Authors: D H Chen, D P DeWitt, Benjamin K Tsai, Kenneth Gruber Kreider, William Andrew Kimes
Abstract: Lightpipe radiation thermometers (LPRTs) are widely used to measure wafer temperatures in rapid thermal processing (RTP) tools. Using blackbody-calibrated LPRTs to infer the wafer temperature, it is necessary to build a model to predict the effectiv ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841674

30. Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools
Published: 5/1/2002
Authors: Kenneth Gruber Kreider, David W Allen, D H Chen, D P DeWitt, Christopher W Meyer, Benjamin K Tsai
Abstract: We investigated the effect of different wafer emissivities and the effect of low emissivity films on RTP wafer temperature measurements using light pipe radiation thermometers (LPRTs). These tests were performed in the NIST RTP test bed. We used a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830778



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