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You searched on: Author: benjamin tsai

Displaying records 21 to 30 of 100 records.
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21. Emittance Standards for Improved Radiation Thermometry During Thermal Processing of Silicon Materials
Published: 6/22/2004
Authors: Benjamin K Tsai, D P DeWitt, E A. Early, Leonard M Hanssen, Sergey Mekhontsev, Matthias Rink, Kenneth Gruber Kreider, B J Lee, Zhuomin Zhang
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841831

22. NIST Measurement Services: Heat Flux Sensor Calibration
Series: Special Publication (NIST SP)
Published: 5/31/2004
Authors: Benjamin K Tsai, Charles E Gibson, S. E. Nagler, D P DeWitt, Robert D. Saunders
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841805

23. Comparing the Transient Response of a Resistive-Type Sensor With a Thin Film Thermocouple During the Post-Exposure Bake Process
Published: 4/1/2004
Authors: Kenneth Gruber Kreider, D P DeWitt, J B Fowler, J E Proctor, William Andrew Kimes, Dean C Ripple, Benjamin K Tsai
Abstract: Recent studies on dynamic temperature profiling and lithographic performance modeling of the post-exposure bake (PEB) process have demonstrated that the rate of heating and cooling may have an important influence on resist lithographic response. Gen ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830864

24. Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control
Published: 1/1/2004
Authors: K G Kreider, D P DeWitt, J B Fowler, J E Proctor, W A. Kimes, D C Ripple, Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104578

25. Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
Published: 1/1/2004
Authors: Benjamin K Tsai, J Bodycomb, D P DeWitt, K G Kreider, W A. Kimes
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104787

26. Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
Published: 1/1/2004
Authors: J Bodycomb, D P DeWitt, W A. Kimes, K G Kreider, Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104323

27. Heat-Flux Sensor Calibration
Series: Special Publication (NIST SP)
Published: 1/1/2004
Authors: Benjamin K Tsai, Charles E Gibson, M V Annageri, D P DeWitt, Robert D. Saunders
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104786

28. In Situ Calibration of Lightpipe Radiometers for Rapid Thermal Processing between 300 {degree} C to 700 {degree} C
Published: 1/1/2004
Authors: W A. Kimes, K G Kreider, D C Ripple, Benjamin K Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104572

29. Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples
Published: 10/1/2003
Authors: Kenneth Gruber Kreider, William Andrew Kimes, Christopher W Meyer, Dean C Ripple, Benjamin K Tsai, D H Chen, D P DeWitt
Abstract: Rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiation thermometers (LPRTs) which have been calibrated with thermocouple instrumented wafers. We have developed a thin-film thermocouple wafer that enables ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830794

30. Characterization and Calibration of Lightpipe Radiation Thermometers for Use in Rapid Thermal Processing
Published: 9/1/2003
Authors: Benjamin K Tsai, D P DeWitt
Abstract: Lightpipe radiation thermometers (LPRTs) are the sensor of choice for temperature measurements in Rapid Thermal Processing (RTP) applications. At the National Institute of Standards and Technology (NIST), we have developed protocols for calibrating ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841652



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Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series