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You searched on: Author: richard silver

Displaying records 31 to 40 of 117 records.
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31. Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy
Published: 4/18/2011
Authors: Richard M Silver, Nien F Zhang, Bryan M Barnes, Hui H. Zhou, Jing Qin, Ronald G Dixson
Abstract: In this paper we present a method to combine measurement techniques that reduce uncertainties and improve measurement throughput. The approach has immediate utility when performing model-based optical critical dimension measurements. When modeling ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908290

32. Light Scattering Methods
Published: 4/9/2011
Authors: Theodore Vincent Vorburger, Richard M Silver, Rainer Brodmann, Boris Brodmann, Jorg Seewig
Abstract: Light scattering belongs to a class of techniques known as area-integrating methods for measuring surface texture. Rather than being based on coordinate measurement, these methods probe an area of the surface altogether and yield parameters that are ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906985

33. Characterizing a Scatterfield Optical Platform for Semiconductor Metrology
Published: 12/21/2010
Authors: Bryan M Barnes, Ravikiran Attota, Richard Quintanilha, Martin Y Sohn, Richard M Silver
Abstract: Scatterfield microscopy is the union of a high-magnification imaging platform and the angular and/or wavelength control of scatterometry at the sample surface. Scatterfield microscopy uses Köhler illumination, where each point on the source translat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905931

34. Topography measurements for correlations of standard cartridge cases
Published: 7/1/2010
Authors: Theodore Vincent Vorburger, Jun-Feng Song, Wei Chu, Thomas B Renegar, Xiaoyu A Zheng, James H Yen, Robert Meryln Thompson, Richard M Silver, Benjamin Bachrach, Martin Ols
Abstract: NIST Standard Reference Materials (SRM) 2460 Standard Bullets and 2461 Standard Cartridge Cases are intended for use as check standards for crime laboratories to help verify that their computerized optical imaging equipment for ballistics image acqui ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905846

35. Nanoparticle size and shape evaluation using the TSOM optical microscopy method
Published: 6/6/2010
Authors: Ravikiran Attota, Richard J Kasica, Lei Chen, Premsagar Purushotham Kavuri, Richard M Silver, Andras Vladar
Abstract: We present a novel optical TSOM (through-focus scanning optical microscopy - pronounced as 'tee-som') method that produces nanoscale dimensional measurement sensitivity using a conventional optical microscope. The TSOM method uses optical information ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905490

36. Optimal Compression and Binarization of Signature Profiles for Automated Bullet Identification Systems
Published: 5/1/2010
Authors: Wei Chu, Jun-Feng Song, Theodore Vincent Vorburger, Robert Meryln Thompson, Thomas B Renegar, Richard M Silver
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905570

37. Sub-50 nm measurements using a 193 nm angle-resolved scatterfield microscope
Published: 4/1/2010
Authors: Richard Quintanilha, Martin Y Sohn, Bryan M Barnes, Richard M Silver
Abstract: Resist-on-silicon sub-50 nm targets have been investigated using a 193 nm angle-resolved scatter field microscope(ARSM). The illumination path of this microscope allows customization of the Conjugate Back Focal Plane (CBFP) while separate collection ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905308

38. The Limits and Extensibility of Optical Patterned Defect Inspection
Published: 4/1/2010
Authors: Richard M Silver, Bryan M Barnes, Martin Y Sohn, Richard Quintanilha, Hui H. Zhou, Chris Deeb, Mark Johnson, Milton Goodwin, Dilip Patel
Abstract: New techniques recently developed at the National Institute of Standards and Technology using bright field optical tools are applied to signal-based defect analysis of features with dimensions well below the measurement wavelength. A key to this app ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905318

39. NIST SRM (Standard Reference Material) 2460/2461 Standard Bullets and Casings Project
Published: 10/13/2009
Authors: Jun-Feng Song, Thomas B Renegar, Xiaoyu A Zheng, Robert Meryln Thompson, Richard M Silver, Martin M Ols, Ted T Vorburger
Abstract: The National Institute of Standards and Technology (NIST) in collaboration with the Bureau of Alcohol, Tobacco, Firearms, and Explosives (ATF) has developed the Standard Reference Material (SRM) 2460 Bullets and 2461 Cartridge Cases. NIST has also d ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903625

40. Photomask metrology using a 193 nm scatterfield microscope
Published: 9/30/2009
Authors: Richard Quintanilha, Bryan M Barnes, Martin Y Sohn, Lowell P. Howard, Richard M Silver, James Edward Potzick, Michael T. Stocker
Abstract: The current photomask linewidth Standard Reference Material (SRM) supplied by the National Institute of Standards and Technology (NIST), SRM 2059, is the fifth generation of such standards for mask metrology. The calibration of this mask has been ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903929



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