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Author: hyun wook ro

Displaying records 11 to 20 of 26 records.
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11. In situ measurement of annealing-induced line shape decay in nanoimprinted polymers using scatterometry
Published: 3/2/2009
Authors: Heather J Patrick, Thomas Avery Germer, Yifu Ding, Hyun Wook Ro, Lee J Richter, Christopher L Soles
Abstract: Thermal embossing nanoimprint lithography (NIL) is an area of continuing interest because it allows direct patterning of nanoscale structures into a wide variety of functional polymer materials. Measuring the shape evolution of nanoimprinted lines d ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901568

12. Scatterometry for in situ measurement of pattern reflow in nanoimprinted polymers
Published: 12/9/2008
Authors: Heather J Patrick, Thomas Avery Germer, Yifu Ding, Hyun Wook Ro, Lee J Richter, Christopher L Soles
Abstract: We use optical scatterometry to extract the time evolution of the profile of nanoimprinted lines in low and high molecular mass polymer gratings during reflow at the glass transition temperature. The data are obtained continuously during the anneal ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=900878

13. Nanoimprint Lithography and the Role of Viscoelasticity in the Generation of Residual Stress in Model Polystyrene Patterns
Published: 6/10/2008
Authors: Yifu Ding, Hyun Wook Ro, Jing N. Zhou, Brian C. Okerberg, Jack F Douglas, Alamgir Karim, Christopher L Soles
Abstract: Understanding polymer deformation during the nanoimprinting process is key to achieve robust polymer nanostructures. Information regarding the process can be extracted from monitoring the decay of the imprinted polymer patterns during thermal anneal ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854115

14. Self-Sealing Nanoporous Low-k Dielectric Patterns Created by Nanoimprint Lithography
Published: 4/15/2008
Authors: Hyun Wook Ro, H Peng, Ken-ich Nihara, Hae-Jeong Lee, Eric K Lin, Alamgir Karim, D Gidley, Hiropshi Jinai, Do Y. Yoon, Christopher L Soles
Abstract: In this letter we describe how highly porous nanostructures can be directly printed into a poly(methylsilsequioxane) (PMSQ)-based organosilicate film, with high pattern fidelity, and develop the measurement infrastructure to quantitatively evaluate ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852758

15. Monitoring Alignment of Osteoblast Cells Directed by Gradient Nanopatterns
Published: 4/6/2008
Authors: Jirun Sun, Yifu Ding, Nancy J Lin, Hyun Wook Ro, Christopher L Soles, Sheng Lin-Gibson
Abstract: We investigated the behavior of pre-osteoblasts cultured on polystyrene and photopolymerized ethoxylated bisphenol-A dimethacrylate gradient patterns. Gradient patterns varying in height from several hundred to 0 nm were prepared using nanoimprinting ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854044

16. Characterizing Pattern Structures Using X-Ray Reflectivity
Published: 3/28/2008
Authors: Hae-Jeong Lee, Christopher L Soles, Hyun Wook Ro, Shuhui Kang, Eric K Lin, Alamgir Karim, Wen-Li Wu
Abstract: Specular X-ray reflectivity (SXR) can be used, in the limit of the effective medium approximation (EMA), as a high-resolution shape metrology for periodic patterns on a planar substrate. The EMA means that the density of the solid pattern and the sp ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852735

17. Nanoimprint Lithography for the Direct Patterning of Nanoporous Interlayer Dielectric Insulator Materials
Published: 3/28/2008
Authors: Hyun Wook Ro, Hae-Jeong Lee, Eric K Lin, Alamgir Karim, Daniel R. Hines, Do Y. Yoon, Christopher L Soles
Abstract: Directly patterning dielectric insulator materials for semiconductor devices via nanoimprint lithography has the potential to simplify fabrication processes and reduce manufacturing costs. However, the prospect of mechanically forming these material ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852733

18. The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography
Published: 10/2/2007
Authors: Hyun Wook Ro, Ronald Leland Jones, H Peng, Daniel R. Hines, Hae-Jeong Lee, Eric K Lin, Alamgir Karim, Do Y. Yoon, D Gidley, Christopher L Soles
Abstract: Directly patterning dielectric insulator materials via nanoimprint lithography has the potential to simplify fabrication processes and significantly reduce the manufacturing costs for semiconductor devices. However, the prospect of mechanically form ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852642

19. Relaxation Behavior of Polymer Structures Fabricated by Nanoimprint Lithography
Published: 8/14/2007
Authors: Yifu Ding, Hyun Wook Ro, Thomas Avery Germer, Jack F Douglas, Brian C. Okerberg, Alamgir Karim, Christopher L Soles
Abstract: We study the decay of the imprinted polystyrene (PS) patterns under thermal annealing using light diffraction. The first order diffraction intensity from the imprinted gratings was measured as a function of annealing time. Local intensity maximum i ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852744

20. Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography
Published: 5/24/2007
Authors: Yifu Ding, Hyun Wook Ro, Jack F Douglas, Ronald Leland Jones, Daniel R. Hines, Alamgir Karim, Christopher L Soles
Abstract: We examine the influence of viscoelastic effects on the stability of nanoimprinted polymer films. The decay of features for polymers below the critical entanglement molecular mass at elevated temperatures is determined by simple surface tension and ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852665



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