Publications Portal
You searched on:
Author: thomas renegar
Sorted by: title
Displaying records 1 to 10 of 32 records.
Resort by: Date / Title
1.
A Simplified Realization for the Gaussian Filter in Surface Metrology
Published: 1/1/2000
Authors: Y B Yuan, Theodore Vincent Vorburger, Jun-Feng Song, Thomas B Renegar
Abstract: A simplified realization for the Gaussian filter in surface metrology is presented in
this paper. The sampling function sinu/u is used for simplifying the Gaussian
function. According to the central limit theorem, when n approaches infinity, the
f
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820991
2.
Accurate Dimensional Metrology With Atomic Force Microscopy
Published: 6/1/2000
Authors: Ronald G Dixson, R Koning, Joseph Fu, Theodore Vincent Vorburger, Thomas B Renegar
Abstract: Atomic force microscopes (AFMs) generate three dimensional images with nanometer level resolution and, consequently, are used in the semiconductor industry as tools for sub-micrometer dimensional metrology. Measurements commonly performed with AFMs a
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820959
3.
An Iterative Algorithm for Calculating Stylus Radius Unambiguously
Published: 9/24/2011
Authors: Theodore Vincent Vorburger, Xiaoyu A Zheng, Thomas B Renegar, Jun-Feng Song, Li Ma
Abstract: The stylus radius is an important specification for stylus instruments and is commonly provided by instrument manufacturers. However, it is difficult to measure the stylus radius unambiguously. Accurate profiles of the stylus tip may be obtained by
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907724
4.
Applications of Cross-Correlation Functions
Published: 4/14/2010
Authors: Theodore Vincent Vorburger, Jun-Feng Song, Wei Chu, Li Ma, Xiaoyu A Zheng, Thomas B Renegar, Son H Bui
Abstract: We describe several examples where we use cross-correlation functions to quantify the similarity of 2D surface profiles or of 3D surface topography images. The applications have included 1) the manufacture of Standard Reference Material (SRM) bullet
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902481
5.
Atomic Level Surface Metrology
Published: 1/1/2001
Authors: Theodore Vincent Vorburger, Ronald G Dixson, Jun-Feng Song, Thomas B Renegar, Joseph Fu, Ndubuisi George Orji, V W. Tsai, E. C. Williams, H Edwards, D Cook, P West, R Nyffenegger
Abstract: MotivationSemiconductor wafers and many types of optical elementsrequire ultra-smooth surfaces in order to functionas specifiedExamples:Laser gyro mirrors with rms roughness ~ 0.1 nmSilicon gate oxides with thickness ~ 3 nm,rms roughness must be sign
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823146
6.
Comparison of Optical and Stylus Methods for Measurement of Rough Surfaces
Published: 1/1/2007
Authors: Theodore Vincent Vorburger, H G Rhee, Thomas B Renegar, Jun-Feng Song, Xiaoyu A Zheng
Abstract: Abstract Optical methods are increasingly used for measurement of surface texture, particularly for areal measurements where the optical methods are generally faster. A new Working Group under Technical Committee (TC) 213 in the International Organiz
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824605
7.
Correlation of Topography Measurements of NIST SRM 2460 Standard Bullets by Four Techniques
Published: 1/1/2006
Authors: Jun-Feng Song, Theodore Vincent Vorburger, Thomas B Renegar, Xiaoyu A Zheng, Hyug-Gyo Rhee, John M Libert, Li Ma, K Bogart, Susan M Ballou, B Bachrach
Abstract: Three optical instruments including an interferometric microscope, a Nipkow disk confocal microscope and a laser scanning confocal microscope are used for the measurements of bullet profile signatures of a National Institute of Standards and Technolo
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822359
8.
Correlation of Topography Measurements of NIST SRM 2460 Standard Bullets by Four Techniques
Published: 1/1/2006
Authors: Jun-Feng Song, Theodore Vincent Vorburger, Thomas B Renegar, Hyug-Gyo Rhee, A Zheng, L Ma, John M Libert, Susan M Ballou, B Bachrach, K Bogart
Abstract: Three optical instruments including an interferometric microscope, a Nipkow disk confocal microscope and a laser scanning confocal microscope are used for the measurements of bullet profile signatures of a NIST (National Institute of Standards and Te
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823187
9.
Development of Ballistics Identification – From Image Comparison to Topography Measurement in Surface Metrology-
Published: 3/22/2012
Authors: Jun-Feng Song, Theodore Vincent Vorburger, Robert Meryln Thompson, Thomas B Renegar, Xiaoyu A Zheng, James H Yen, Richard M Silver, Wei Chu
Abstract: Fired bullets and ejected cartridge cases have unique ballistics signatures left by the firearm. By analyzing the ballistics signatures, forensic examiners can trace these bullets and cartridge cases to the firearm used in a crime scene. Current au
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908043
10.
Dimensional Metrology of Millimeter- and Sub-millimeter-scale Components
Published: 10/1/2000
Authors: Theodore Vincent Vorburger, Jun-Feng Song, Joseph Fu, M Tundermann, Thomas B Renegar, Theodore D Doiron, N G Orji
Abstract: Decreasing sizes and tolerances of engineering components bring a demand for decreasing uncertainty in the dimensional measurements of these parts. Hence there is increasing need for measuring machines capable of performing dimensional and geometrica
...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820999