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Author: michael postek

Displaying records 191 to 200 of 225 records.
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191. X-Ray Mask Metrology: The Development of Linewidth Standards for X-Ray Lithography
Published: 12/31/1993
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, E Marx, Robert D. Larrabee
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=15044

192. Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies
Published: 9/1/1993
Authors: Richard A Allen, P. Troccolo, James C. OwenI, James Edward Potzick, Michael T Postek, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=29951

193. X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement
Series: Journal of Research (NIST JRES)
Published: 8/1/1993
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, E Marx, Robert D. Larrabee
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10599

194. Cryopump Vibration Isolation System for an SEM
Published: 12/31/1991
Authors: Michael T Postek, William J. Keery
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=4348

195. Microchannel-Plate Detection Systems for Low Accelerating Voltage SEM
Published: 12/31/1991
Author: Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=4008

196. SEM Imaging and Metrology at Low Accelerating Voltages Using Backscattered Electrons
Published: 12/31/1991
Author: Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=11050

197. STM Pattern Generation on Silicon and GaAs Surfaces
Published: 12/31/1991
Authors: John A. Dagata, J. Schneir, Howard H. Harary, C J Evans, Michael T Postek, J. Bennett, W. F. Tseng
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=9638

198. The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection
Published: 12/31/1991
Authors: Michael T Postek, Robert D. Larrabee, William J. Keery, E Marx
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8802

199. Submicrometer Critical Dimensional Metrology
Published: 12/1/1991
Authors: Robert D. Larrabee, Loren W. Linholm, Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=15444

200. Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology
Published: 12/31/1990
Authors: Michael T Postek, William J. Keery, Nolan V. Frederick
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2071



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