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Author: michael postek

Displaying records 191 to 200 of 226 records.
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191. Traceable Standards for Scanning Electron Microscopy
Published: 1/1/1994
Author: Michael T Postek
Abstract: The emphasis on International Standards Organization (ISO) certification of laboratories has resulted in a renewed interest in NIST traceable standards for scanning electron microscopy (SEM). Under ISO certification, it is mandatory to calibrate and ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820996

192. X-Ray Mask Metrology: The Development of Linewidth Standards for X-Ray Lithography
Published: 12/31/1993
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, E Marx, Robert D. Larrabee
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=15044

193. Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies
Published: 9/1/1993
Authors: Richard A Allen, P. Troccolo, James C. OwenI, James Edward Potzick, Michael T Postek, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=29951

194. X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement
Series: Journal of Research (NIST JRES)
Published: 8/1/1993
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, E Marx, Robert D. Larrabee
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10599

195. Cryopump Vibration Isolation System for an SEM
Published: 12/31/1991
Authors: Michael T Postek, William J. Keery
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=4348

196. Microchannel-Plate Detection Systems for Low Accelerating Voltage SEM
Published: 12/31/1991
Author: Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=4008

197. SEM Imaging and Metrology at Low Accelerating Voltages Using Backscattered Electrons
Published: 12/31/1991
Author: Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=11050

198. STM Pattern Generation on Silicon and GaAs Surfaces
Published: 12/31/1991
Authors: John A Dagata, J. Schneir, Howard H. Harary, C J Evans, Michael T Postek, J. Bennett, W. F. Tseng
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=9638

199. The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection
Published: 12/31/1991
Authors: Michael T Postek, Robert D. Larrabee, William J. Keery, E Marx
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8802

200. Submicrometer Critical Dimensional Metrology
Published: 12/1/1991
Authors: Robert D. Larrabee, Loren W. Linholm, Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=15444



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