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You searched on: Author: william penzes

Displaying records 21 to 22.
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21. Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System
Published: 12/31/1993
Authors: Michael W. Cresswell, Richard A Allen, C. H. Linholm, Colleen E. Hood, William B. Penzes, E Clayton Teague

22. Electronic Limitations in Phase Meters for Heterodyne Interferometry
Published: 10/1/1991
Authors: Nile M. Oldham, P. S. Hetrick, John A Kramar, William B. Penzes, T. Wheatley, E Clayton Teague

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