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Author: egon marx

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51. Integral Equation for Scattering by a Rough Surface
Published: 1/1/1996
Author: Egon Marx
Abstract: An equation for an unknown surface field that represents scattering by a rough patch on a flat dielectric surface is presented. The geometrical considerations for this particular problem are discussed, especially in relation to a surface divergence f ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820796

52. Relativistic Covariance and the Interpretation of Quantum Mechanics
Published: 1/1/1996
Author: Egon Marx
Abstract: The standard interpretation of quantum mechanics is revised to conform to the relativistic theory based on the many-amplitudes formalism for the N-particle system. The wave function acquires a significance closer to that of the electromagnetic field, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820797

53. Light Scattered by Sinusoidal Surfaces: Illumination Windows and Harmonics in Standards
Published: 3/1/1995
Authors: Egon Marx, T Lettieri, Theodore Vincent Vorburger
Abstract: Sinusoidal surfaces can be used as material standards to help calibrate instruments that measure the angular distribution of the intensity of light scattered by arbitrary surfaces, because the power in the diffraction peaks varies over several orders ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820747

54. Scattering by a Dielectric Wedge: Oblique Incidence
Published: 1/1/1995
Author: Egon Marx
Abstract: The scattering of a plane monochromatic wave by an infinite dielectric wedge is discussed for arbitrary direction of incidence and polarization. Two sets of coupled integral equations for an unknown surface function are derived. The behavior of the f ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820746

55. User's Manual for the Program MONEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology
Series: Technical Note (NIST TN)
Report Number: 400
Published: 1/1/1995
Authors: J R. Lowney, Egon Marx
Abstract: This user's manual is a guide to the FORTRAN code MONSEL-I which is a Monte Carlo simulation of the transmitted and backscattered electron signals in a scanning electron microscope (SEM) associated with a line specimen with a trapezoidal cross sectio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820688

56. Radiation Scattered by Two Touching Spheres
Published: 6/20/1994
Author: Egon Marx
Abstract: During the manufacture of powder metal, the size distribution of the metal spheres can be determined to some extent by the distribution of light scattered by the spheres while they are streaming by a laser beam. Micrographs show the presence of chain ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820692

57. Electron Beam Interaction Modeling as Applied to X-Ray Lithography Mask SEM Linewidth Metrology
Published: 1/1/1994
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, Egon Marx, Robert D. Larrabee
Abstract: This work provides an approach to improved x?ray mask linewidth metrology and a more precise edge location algorithm for measurement of feature sizes on x?ray masks in commercial instrumentation. The transmitted electron detection mode is also useful ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820704

58. Regimes of Surface Roughness Measurable with Light Scattering
Published: 1/1/1993
Authors: Theodore Vincent Vorburger, Egon Marx, T Lettieri
Abstract: In this paper we summarize a number of previous experiments on the measurement of the roughness of metallic surfaces by light scattering. We identify several regimes that permit measurement of different surface parameters and functions, and we establ ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821000