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Author: joaquin martinez

Displaying records 11 to 20 of 24 records.
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11. Critical Dimension Reference Features with Sub-Five Nanometer Uncertainty
Published: 5/30/2005
Authors: Michael W Cresswell, Ronald G Dixson, William F Guthrie, Richard A Allen, Christine E. Murabito, Brandon Park, Joaquin (Jack) Martinez, Amy Hunt
Abstract: The implementation of a new type of HRTEM-imaging (High-Resolution Transmission Electron Microscopy) test structure, and the use of CD-AFM (CD-Atomic Force Microscopy) to serve as the transfer metrology have resulted in reductions in the uncertaintie ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31923

12. Challenges in Metrology for the Semiconductor Industry
Published: 3/21/2005
Authors: Stephen Knight, Joaquin (Jack) Martinez
Abstract: Leading edge Ultra Large Scale Integrated Circuit manufacture is now well into the realm of Nanoelectronics, with some critical dimensions below 40 nm. The pressures on metrology supporting this manufacture are escalating rapidly. In this presentatio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31889

13. Report of Investigation of RM 8111: Single-Crystal Critical Dimension Prototype Reference Materials
Published: 3/2/2005
Authors: Michael W Cresswell, Richard A Allen, Ronald G Dixson, William F Guthrie, Christine E. Murabito, Brandon Park, Joaquin (Jack) Martinez
Abstract: Staff of the Semiconductor Electronics Division, the Information Technology Laboratory, and the Precision Engineering Laboratory at NIST, in collaboration with VLSI Standards, Inc., of San Jose, California, have developed a new generation of prototyp ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31868

14. Office of Microelectronics Programs - Programs, Activities, and Accomplishments
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: NISTIR7171
Published: 1/1/2005
Authors: Stephen Knight, Joaquin (Jack) Martinez, Michele L. Buckley
Abstract: The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. That ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31836

15. Semiconductor Metrology Programs at NIST
Published: 9/15/2004
Authors: Joaquin (Jack) Martinez, Stephen Knight
Abstract: The history of the National Bureau of Standards/National Institute of Standards and Technology (NBS/NIST) will be briefly reviewed emphasizing the creation of the National Semiconductor Metrology Program (NSMP) and the Office of Microelectronics Prog ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31780

16. Semiconductor Microelectronics and Nanoelectronics Programs
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 1534
Published: 7/1/2004
Authors: Stephen Knight, Joaquin (Jack) Martinez, Michele L. Buckley
Abstract: The microelectornics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The N ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31734

17. Reliability Metrology for the Semiconductor Industry at NIST
Published: 4/10/2004
Authors: Stephen Knight, John S Suehle, Joaquin (Jack) Martinez
Abstract: The National Institute of Standards and Technology provides critical metrology development for the semiconductor manufacturing industry as it moves from the microelectronics era into the nanoelectronics era. This presentation will describe the Nation ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31629

18. Metrology Development for the Nanoelectronics Industry at the National Institute of Standards and Technology
Published: 3/7/2004
Authors: Joaquin (Jack) Martinez, John A. Dagata, Curt A Richter, Richard M Silver
Abstract: The National Institute of Standards and Technology has provided and continues to provide critical metrology development for the semiconductor manufacturing industry as it moves from the microelectronic era into the nanoelectronic era. This presentaio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31539

19. Interim Report on Single Crystal Critical Dimension Reference Materials (SCCDRM)
Published: 1/1/2004
Authors: Ronald G Dixson, Michael W Cresswell, Richard A Allen, William F Guthrie, Brandon Park, Christine E. Murabito, Joaquin (Jack) Martinez
Abstract: The single crystal critical dimension reference materials (SCCDRM) project has been completed, and the samples for the SEMATECH member companies have been released for distribution.  The final technology transfer report is currently undergoing r ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822245

20. Semiconductor Microelectronics and Nanoelectronics Programs
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 7010
Published: 7/1/2003
Authors: Stephen Knight, Joaquin (Jack) Martinez, Michele L. Buckley
Abstract: The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid imporvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The N ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31401



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Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
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