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Author: zachary levine

Displaying records 71 to 80 of 101 records.
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71. X-Ray Tomography of Integrated Circuit Interconnects: Past and Future
Published: 11/1/2001
Author: Zachary H Levine
Abstract: An Al-W-silica integrated circuit interconnect sample was thinned to several micro {mu} and scanned across a 200 nm focal spot of a Fresnel zone plate operating at photon energy of 1573 eV. The experiment was performed on beamline 2-ID-B of the Adva ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840114

72. Tomography of Integrated Circuit Interconnects
Published: 10/1/2001
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: 00 Word summary based on the paper:Z. H. Levine, A. R. Kalukin, M. Kuhn, S. P. Frigo, I. McNulty,>C. C. Retsch, Y. Wang, U. Arp, T. B. Lucatorto, B. D. Ravel, and C. Tarrio,>``Microtomography of Integrated Circuit Interconnect with an> Electromigra ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840113

73. Accurate Pattern Registration for Integrated Circuit Tomography
Published: 7/1/2001
Authors: Zachary H Levine, S Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Y Wang, Thomas B Lucatorto
Abstract: As part of an effort to develop high resolution microtomography for engineered structures, a two-level copper integrated circuit interconnect was imaged using 1.83 keV x-rays at 14 angles employing a full-field Fresnel zone plate microscope. A major ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840063

74. AnEig: A Routine to Calculate the Eigenvalues and Eigenvectors of a Tensor Related to the Spatial Dispersion of Birefringence
Published: 6/1/2001
Author: Zachary H Levine
Abstract: A Fortran Subroutine and Mathematica function are given which calculate the eigenvalues and eigenvectors of a tensor which gives the anisotropy of the optical response in cubic crystals.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840111

75. Accurate pattern registration for integrated circuit tomography
Published: 1/1/2001
Authors: Zachary H Levine, Steven E Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Ying-ju Wang, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101603

76. Intrinsic Birefringence in Calcium Fluoride and Barium Fluoride
Published: 1/1/2001
Authors: John H. Burnett, Zachary H Levine
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101998

77. Intrinsic Birefringence of Calcium Fluoride
Published: 1/1/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101465

78. Intrinsic birefringence in cubic crystals: a new concern for lithography
Published: 1/1/2001
Authors: J H Burnett, Zachary H Levine, Eric L Shirley
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101380

79. Calibration of High-Resolution X-Ray Tomography With Atomic Force Microscopy
Series: Journal of Research (NIST JRES)
Published: 11/1/2000
Authors: A R Kalukin, B Winn, S S Wang, C Jacobsen, Zachary H Levine, Joseph Fu
Abstract: For two-dimensional x-ray imaging of thin films, the technique of scanning transmission x-ray miscroscopy (STXM) has achieved images with feature sizes as small as 40 nm in recent years. However, calibration of three-dimensional tomographic images t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840060

80. Tomography of Integrated Circuit Interconnect With an Electromigration Void
Published: 5/1/2000
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: An integrated circuit interconnect was subject to accelerated-life conditions to induce an electromigration void. The silicon substrate was removed, leaving only the interconnect encased test structure encased in silica. We imaged the sample wit ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840087



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