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Author: zachary levine

Displaying records 71 to 80 of 103 records.
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71. Intrinsic Birefringence in Calcium Fluoride and Barium Floride
Published: 12/1/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
Abstract: We have measured an intrinsic birefringence in calcium fluoride in the ultraviolet for wavelengths from 365 nm down to 156 nm, and compared these results with theory and calculations. The measured effect is largest for propagation in the [110] direc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840507

72. Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography
Published: 12/1/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
Abstract: lcium fluoride (CaF2) and other crystalline fluoride materials are beingexploited for latest-generation lithography optics, making up a significantcomponent of the optics of 193nm lithography systems and potentially theexclusive optical materials fo ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840558

73. X-Ray Tomography of Integrated Circuit Interconnects: Past and Future
Published: 11/1/2001
Author: Zachary H Levine
Abstract: An Al-W-silica integrated circuit interconnect sample was thinned to several micro {mu} and scanned across a 200 nm focal spot of a Fresnel zone plate operating at photon energy of 1573 eV. The experiment was performed on beamline 2-ID-B of the Adva ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840114

74. Tomography of Integrated Circuit Interconnects
Published: 10/1/2001
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: 00 Word summary based on the paper:Z. H. Levine, A. R. Kalukin, M. Kuhn, S. P. Frigo, I. McNulty,>C. C. Retsch, Y. Wang, U. Arp, T. B. Lucatorto, B. D. Ravel, and C. Tarrio,>``Microtomography of Integrated Circuit Interconnect with an> Electromigra ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840113

75. Accurate Pattern Registration for Integrated Circuit Tomography
Published: 7/1/2001
Authors: Zachary H Levine, S Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Y Wang, Thomas B Lucatorto
Abstract: As part of an effort to develop high resolution microtomography for engineered structures, a two-level copper integrated circuit interconnect was imaged using 1.83 keV x-rays at 14 angles employing a full-field Fresnel zone plate microscope. A major ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840063

76. AnEig: A Routine to Calculate the Eigenvalues and Eigenvectors of a Tensor Related to the Spatial Dispersion of Birefringence
Published: 6/1/2001
Author: Zachary H Levine
Abstract: A Fortran Subroutine and Mathematica function are given which calculate the eigenvalues and eigenvectors of a tensor which gives the anisotropy of the optical response in cubic crystals.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840111

77. Accurate pattern registration for integrated circuit tomography
Published: 1/1/2001
Authors: Zachary H Levine, Steven E Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Ying-ju Wang, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101603

78. Intrinsic Birefringence in Calcium Fluoride and Barium Fluoride
Published: 1/1/2001
Authors: John H. Burnett, Zachary H Levine
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101998

79. Intrinsic Birefringence of Calcium Fluoride
Published: 1/1/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101465

80. Intrinsic birefringence in cubic crystals: a new concern for lithography
Published: 1/1/2001
Authors: J H Burnett, Zachary H Levine, Eric L Shirley
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101380



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