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Author: william keery

Displaying records 11 to 20 of 26 records.
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11. New Algorithm for the Measurement of Pitch in Metrology Instruments
Published: 5/1/1996
Authors: Nien F Zhang, Michael T Postek, Robert D. Larrabee, L Carroll, William J. Keery
Abstract: Traditionally, the measurement of pitch in metrology instruments is thought to be a benign self-compensating function. However, as the measurement uncertainty of metrology instruments is pushed to the nanometer level, evaluation of the performance of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820831

12. Electron Beam Interaction Modeling as Applied to X-Ray Lithography Mask SEM Linewidth Metrology
Published: 12/31/1994
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, E Marx, Robert D. Larrabee
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28049

13. Electron Beam Interaction Modeling as Applied to X-Ray Lithography Mask SEM Linewidth Metrology
Published: 1/1/1994
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, Egon Marx, Robert D. Larrabee
Abstract: This work provides an approach to improved x?ray mask linewidth metrology and a more precise edge location algorithm for measurement of feature sizes on x?ray masks in commercial instrumentation. The transmitted electron detection mode is also useful ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820704

14. X-Ray Mask Metrology: The Development of Linewidth Standards for X-Ray Lithography
Published: 12/31/1993
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, E Marx, Robert D. Larrabee
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=15044

15. X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement
Series: Journal of Research (NIST JRES)
Published: 8/1/1993
Authors: Michael T Postek, J R. Lowney, Andras Vladar, William J. Keery, E Marx, Robert D. Larrabee
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10599

16. Cryopump Vibration Isolation System for an SEM
Published: 12/31/1991
Authors: Michael T Postek, William J. Keery
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=4348

17. The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection
Published: 12/31/1991
Authors: Michael T Postek, Robert D. Larrabee, William J. Keery, E Marx
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8802

18. Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology
Published: 12/31/1990
Authors: Michael T Postek, William J. Keery, Nolan V. Frederick
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2071

19. Low-Profile Microchannel-Plate Electron Detector System for SEM
Published: 12/31/1990
Authors: Michael T Postek, William J. Keery, Nolan V. Frederick
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2557

20. Low-Profile High-Efficiency Microchannel-Plate Detector System for Scanning Electron Microscopy Applications
Published: 6/1/1990
Authors: Michael T Postek, William J. Keery, Nolan V. Frederick
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3462



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