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Author: samuel jones

Displaying records 11 to 13.
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11. Application of Transmission Electron Detection to SCALPEL Mask Metrology
Published: 11/1/1997
Authors: R Farrow, Michael T Postek, William J. Keery, Samuel N Jones, J R. Lowney, M Blakey, L Fetter, J Griffith, J E Liddle, L C Hopkins, H A Huggins, M Peabody,, A Novembre
Abstract: Linewidth measurements were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam lithography mask using the transmitted electron signal in a modified scanning electron microscope. Features as small ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820894

12. Application of Trasmission Electron Detection to Scalpel Mask Metrology
Published: 11/1/1997
Authors: R Farrow, Michael T Postek, William J. Keery, Samuel N Jones, J R. Lowney, M Blakey, L Fetter, A Liddle, L C Hopkins, H A Huggins, M Peabody, A Novembre, J Griffith
Abstract: Linewidth measurements were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam lithography mask using the transmitted electron signal in a modified scanning electron microscope. Features as small ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823090

13. An Electrical Method for Determining the Thickness of Metal Films and the Cross-Sectional Area of Metal Lines
Published: 12/31/1995
Authors: Harry A. Schafft, Santos D Mayo, Samuel N Jones, John S Suehle
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=14447



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