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Author: colleen hood

Displaying records 21 to 26.
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21. New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology
Published: 8/1/1994
Authors: Michael W Cresswell, Richard A Allen, Loren W. Linholm, Colleen E. Hood, William B. Penzes
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10192

22. Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System
Published: 12/31/1993
Authors: Michael W Cresswell, Richard A Allen, C. H. Linholm, Colleen E. Hood, William B. Penzes, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2991

23. The Design Guide for CMOS-on-SIMOX Test Chips NIST3 and NIST4
Series: NIST Interagency/Internal Report (NISTIR)
Published: 1/1/1993
Authors: Janet M Cassard, Michael W Cresswell, Colleen E. Hood, Loren W. Linholm, Peter Roitman, Mona Elwakkad Zaghloul
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=21343

24. The Test Guide for CMOS-on-SIMOX Test Chips NIST3 and NIST4
Series: NIST Interagency/Internal Report (NISTIR)
Published: 1/1/1993
Authors: Janet M Cassard, Michael W Cresswell, Colleen E. Hood, Loren W. Linholm, Peter Roitman
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=21846

25. Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology
Published: 12/31/1992
Authors: Richard A Allen, Michael W Cresswell, Colleen E. Hood, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3920

26. Test Chip for the Evaluation of Surface Diffusion Phenomena in Sputtered Aluminum Planarization Processes
Published: 12/31/1991
Authors: M. A. Jones, John W. Roberts, Colleen E. Hood, Michael W Cresswell, Richard A Allen
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=4689



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