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Author: colleen hood

Displaying records 11 to 20 of 26 records.
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11. MEMS-based Embedded Sensor Virtual Components for SoC
Published: 11/25/2003
Authors: Muhammad Yaqub Afridi, Allen R Hefner Jr, David W. Berning, Colleen E. Hood, Ankush Varma, Bruce Jacob, Stephen Semancik
Abstract: Advancement in MEMS-based sensors brings a new challenge for system-on-a-chip (SoC) design integration where analog and digital circuits coexist on a common substrate with the actual sensing platform. Integration of these MEMS-based sensors into an S ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31571

12. High Speed IGBT Module Transient Thermal Response Measurements for Model Validation
Published: 10/12/2003
Authors: David W. Berning, John V. Reichl, Allen R Hefner Jr, Mora Hernandez, Colleen E. Hood, Jih-Sheng Lai
Abstract: A measurement system operates a multi-chip insulated gate bipolar transistor (IGBT) that is part of an integrated power electronic module (IPEM) in a high-pulsed-power linear mode for validation of dynamic thermal models. It is found that the gate-ca ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31382

13. Test Structures for Referencing Electrical Linewidth Measurements to Silicon Lattice Parameters Using HRTEM
Published: 5/1/2003
Authors: Richard A Allen, B A am Ende, Michael W Cresswell, Christine E. Murabito, T J. Headley, William F Guthrie, Loren W. Linholm, Colleen E. Hood, E. Hal Bogardus
Abstract: A technique has been developed to determine the linewidths of the features of a prototype reference material for the calibration of CD (Critical-Dimension) metrology instruments. The reference features are fabricated in mono-crystalline-silicon with ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30085

14. Test Structures for Referencing Electronics Linewidth Measurements to Silicon Lattice Parameters Using HRTEM
Published: 4/8/2002
Authors: Richard A Allen, Michael W Cresswell, Christine E. Murabito, William F Guthrie, Loren W. Linholm, Colleen E. Hood, E. Hal Bogardus
Abstract: A technique has been developed to certify the linewidths of the features of a prototype reference materials for the calibration of CD (Critical-Dimension) metrology instruments. The reference features are fabricated in mono-crystalline-silicon with ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8663

15. Transient Heating Study of Microhotplates by Using a High-Speed Thermal Imaging System
Published: 3/1/2002
Authors: Muhammad Yaqub Afridi, David W. Berning, Allen R Hefner Jr, John S Suehle, Mona Elwakkad Zaghloul, Eric Kelley, Zharadeen Rodriguez Parrilla, Colleen E. Hood
Abstract: A high-speed thermal imaging system is used to investigate the dynamic thermal behavior of MEMS-based (MicroElectroMechanical Systems) microhotplate devices. These devices are suspended microstructures fabricated in CMOS technology and are used in va ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=14143

16. A Novel Method for Fabricating CD Reference Materials with 100 nm Linewidths
Published: 12/31/2000
Authors: Richard A Allen, Loren W. Linholm, Michael W Cresswell, Colleen E. Hood
Abstract: A technique has been developed to fabricate 100-nm CD reference features with I-line lithography by utilizing a unique characteristic of single-crystal silicon-on-insulator films: Under certain etch conditions, the edges of features align to crystall ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=20631

17. Impact of Test-Structure Design and Test Methods for Electromigration Testing
Published: 3/1/2000
Authors: S. Menon, J. Fazekas, Jochen von Hagen, Linda M. Head, Colleen E. Hood, Harry A. Schafft
Abstract: The ultimate goal of this work is to develop design guidelines for electromigration test structures and to revise existing standard test methods for fast wafer-level and conventional package-level stress testing. These tests all involve stressing a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=9569

18. The Enhanced Voltage-Dividing Potentiometer for High-Precision Feature Placement Metrology
Published: 2/1/1996
Authors: Richard A Allen, Michael W Cresswell, Colleen E. Hood, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3815

19. Application of the Modified Voltage-Dividing Potentiometer to Overlay Metrology in a CMOS/Bulk Process
Published: 12/31/1994
Authors: Richard A Allen, Michael W Cresswell, Loren W. Linholm, Jinsheng Wen, Colleen E. Hood, T. A. Hill, J. D. Benecke, S. R. Volk, H. D. Stewart
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=25863

20. Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards
Published: 12/31/1994
Authors: Michael W Cresswell, William B. Penzes, Richard A Allen, Loren W. Linholm, Colleen E. Hood, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27496



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