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You searched on: Author: william guthrie

Displaying records 71 to 80 of 83 records.
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71. Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference-Material Applications
Published: 5/1/1998
Authors: Michael W. Cresswell, Richard A Allen, William F Guthrie, Rathindra Ghoshtagore, Loren W. Linholm, J. J. Sniegowski
Abstract: The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of mono-crystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are pattern ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=18597

72. Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference Material Applications
Published: 12/31/1997
Authors: Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, William F Guthrie, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=7227

73. Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films
Published: 12/31/1997
Authors: W. F. Lee, William F Guthrie, Michael W. Cresswell, Richard A Allen, J. J. Sniegowski, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3491

74. Hybrid Optical-Electrical Overlay Test Structure
Published: 5/1/1997
Authors: Michael W. Cresswell, Richard A Allen, Loren W. Linholm, William F Guthrie, William B. Penzes, A. W. Gurnell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=23722

75. Hybrid Optical-Electrical Overlay Test Structure
Published: 1/1/1997
Authors: Michael W. Cresswell, Robert Allen, L Linholm, William F Guthrie, William B. Penzes, A Gurnell
Abstract: This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor semiconductor-device fabrication processes. Such optical instruments are known to be vulnerabl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820834

76. Hybrid Optical-Electrical Overlay Test Structure
Published: 12/31/1996
Authors: Michael W. Cresswell, Richard A Allen, Loren W. Linholm, William F Guthrie, A. W. Gurnell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=7729

77. Recent Developments in Electrical Linewidth and Overlay Metrology for Integrated Circuit Fabrication Processes
Published: 12/31/1996
Authors: Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, William F Guthrie, A. W. Gurnell, Loren W. Linholm, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27620

78. A Gravimetric Approach to the Standard Addition Method in Instrumental Analysis 1
Published: Date unknown
Authors: William R. Kelly, Bruce S MacDonald, William F Guthrie
Abstract: A general mathematical formulation for the method of standard additions is presented that has universal applicability. It is based on gravimetry rather than volumetry which reduces the preparation time, gives greater flexibility to design because on ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=832173

79. A Survey of Key Comparisons A Survey of Design, Analysis, and Reporting of Results in Key Comparisons
Published: Date unknown
Authors: Adriana Hornikova, William F Guthrie
Abstract: Key comparisons are international inter-laboratory studies used to establish the degree of equivalence between national measurement standards. These studies, carried out by National Metrology Institutes (NMIs), are time-consuming, but necessary to fa ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=50656

80. Determination of Sulfur in Biodiesel by XRF Using the Gravimetric Standard Addition Method
Published: Date unknown
Authors: Lydia Baker, William R. Kelly, William F Guthrie
Abstract: The sulfur content of three biodiesels samples was determined XRF using a calibration curve based on petroleum-based diesel SRMs and by the standard addition method using a high sulfur diesel fuel SRM as the spike. Biodiesel contains about 11 % oxyg ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=832183



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