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You searched on: Author: william guthrie

Displaying records 71 to 80 of 85 records.
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71. Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries
Published: 12/31/1998
Authors: Michael W. Cresswell, Nadine Guillaume, Richard A Allen, William F Guthrie, Rathindra Ghoshtagore, James C. OwenI II, Z. Osborne, N. Sullivan, Loren W. Linholm
Abstract: This paper describes methods for the extraction of sheet resistance from V/I measurements made on four-terminal sheet resistors incorporated into electrical linewidth test structures patterned with non-planar geometries in monocrystalline silicon-on- ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28180

72. Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology
Published: 12/31/1998
Authors: Santos D Mayo, Joseph J Kopanski, William F Guthrie
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27867

73. Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference-Material Applications
Published: 5/1/1998
Authors: Michael W. Cresswell, Richard A Allen, William F Guthrie, Rathindra Ghoshtagore, Loren W. Linholm, J. J. Sniegowski
Abstract: The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of mono-crystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are pattern ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=18597

74. Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference Material Applications
Published: 12/31/1997
Authors: Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, William F Guthrie, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=7227

75. Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films
Published: 12/31/1997
Authors: W. F. Lee, William F Guthrie, Michael W. Cresswell, Richard A Allen, J. J. Sniegowski, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3491

76. Hybrid Optical-Electrical Overlay Test Structure
Published: 5/1/1997
Authors: Michael W. Cresswell, Richard A Allen, Loren W. Linholm, William F Guthrie, William B. Penzes, A. W. Gurnell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=23722

77. Hybrid Optical-Electrical Overlay Test Structure
Published: 1/1/1997
Authors: Michael W. Cresswell, Robert Allen, L Linholm, William F Guthrie, William B. Penzes, A Gurnell
Abstract: This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor semiconductor-device fabrication processes. Such optical instruments are known to be vulnerabl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820834

78. Hybrid Optical-Electrical Overlay Test Structure
Published: 12/31/1996
Authors: Michael W. Cresswell, Richard A Allen, Loren W. Linholm, William F Guthrie, A. W. Gurnell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=7729

79. Recent Developments in Electrical Linewidth and Overlay Metrology for Integrated Circuit Fabrication Processes
Published: 12/31/1996
Authors: Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, William F Guthrie, A. W. Gurnell, Loren W. Linholm, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27620

80. A Gravimetric Approach to the Standard Addition Method in Instrumental Analysis 1
Published: Date unknown
Authors: William R. Kelly, Bruce S MacDonald, William F Guthrie
Abstract: A general mathematical formulation for the method of standard additions is presented that has universal applicability. It is based on gravimetry rather than volumetry which reduces the preparation time, gives greater flexibility to design because on ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=832173



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