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Author: martin green

Displaying records 11 to 20 of 31 records.
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11. Round-Robin Studies of Two Potential Seebeck Coefficient Standard Reference Materials
Published: 1/14/2009
Authors: Nathan Lowhorn, Winnie K Wong-Ng, Weiping Zhang, John Lu, Makoto Otani, Evan L. Thomas, Martin L Green, Thanh Tran
Abstract: The scientific activities of NIST include the development and distribution of standard reference materials (SRM) for instrument calibration and inter-laboratory data comparison. Full characterization of a thermoelectric material requires measurement ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851059

12. Combinatorial study of the crystallinity boundary in the HfO2-TiO2-Y2O3 system using pulsed laser deposition library thin films
Published: 5/16/2008
Authors: Peter K. Schenck, Jennifer L Klamo, Nabil Bassim, Peter G. Burke, Yvonne Beatrice Gerbig, Martin L Green
Abstract: HfO2-TiO2-Y2O3 is an interesting high-k dielectric system.  Combinatorial library films of this system enable the study of the role of composition on phase formation as well as optical and mechanical properties.  A library film of this syst ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853610

13. Close Proximity Self-Aligned Shadow Mask for Sputter Deposition Onto a Membrane or Cavity
Published: 5/5/2008
Authors: Ravi Kummamuru, L Hu, Lawrence P. Cook, M Y Efremov, E A Olson, Martin L Green, L H Allen
Abstract: In this paper we report fabrication of a shadow mask designed for sputtering into cavities or on the back surface of freestanding silicon nitride (SiNx) membranes. Sputter deposition through a shadow mask typically results in spreading of the deposit ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853574

14. Determination of Work Functions in the Ta^d1-x^Al^dx^N^dy^/HfO^d2^ Advanced Gate Stack Using Combinatorial Methodology
Published: 1/24/2008
Authors: Kao-Shuo Chang, Martin L Green, Jason Hattrick-Simpers, John S Suehle, Ichiro Takeuchi, Ozgur Celik, S De Gendt
Abstract: Combinatorial methodology enables the generation of comprehensive and uniform samples, and therefore data sets, compared to the one-composition-at-a-time approach. We demonstrate the efficacy of combinatorial methodology applied to Ta1-xAlxNy alloy ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851089

15. Combinatorial Methodology for the Exploration of Metal Gate Electrodes on HfO^d2^ for the Advanced Gate Stack
Published: 1/23/2008
Authors: Kao-Shuo Chang, Martin L Green, John S Suehle, Jason Hattrick-Simpers, Ichiro Takeuchi, K Ohmori, T Chikyow, S De Gendt, Prashant Majhi
Abstract: Combinatorial methodology offers an efficient platform to accelerate the exploration of new materials. We demonstrate the effectiveness of this technique on the study of new metal gates for the advanced gate stack. We report two examples, Ni-Ti-Pt te ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853566

16. Design and Spectroscopic Reflectometry Characterization of Pulsed Laser Deposition Combinatorial Libraries
Published: 11/30/2007
Authors: Peter K. Schenck, Nabil Bassim, Makoto Otani, Hiroyuki Oguchi, Martin L Green
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854361

17. Development of High-throughput Thermoelectric Screening Tool for Combinatorial Thin Libraries
Published: 11/30/2007
Authors: Makoto Otani, K Itaka, Winnie K Wong-Ng, H Koinuma, Martin L Green
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854359

18. A high-throughput thermoelectric power-factor screening tool for rapid construction of thermoelectric property diagrams
Published: 9/24/2007
Authors: Makoto Otani, N D Lowhorn, Peter K. Schenck, Winnie K Wong-Ng, Martin L Green, K Itaka, H Koinuma
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854387

19. Instability of Flatband Voltage in HfO2 Gate Stack Structures under Reducing/Oxidizing Annealing Conditions
Published: 8/13/2007
Authors: K Ohmori, P Ahmet, M Yoshitake, T Chikyow, K Shiraishi, K Yamabe, H Watanabe, Y Akasaka, Kao-Shuo Chang, Martin L Green, K Yamada
Abstract: We have applied a combinatorial approach to fabricate work function (WF) tuned Pt-W alloy films and used the films as metal electrodes for HfO2/SiO2/Si capacitors. As the ratio RPt of Pt to W changes from 0 to 1, the WF value varies continuously from ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851023

20. High Contrast Scanning Nano-Raman Spectroscopy of Silicon
Published: 6/15/2007
Authors: N Lee, R Hartschuh, D Mehtani, A Kisliuk, M D Foster, Alexei Sokolov, J F Maguire, Martin L Green
Abstract: We have demonstrated that scanning nano-Raman spectroscopy (SNRS), generally known as tip enhanced Raman spectroscopy (TERS), with side illumination optics can be effectively used for analysis of silicon based structures at the nanoscale. Even though ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851022



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