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Author: steven grantham
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Displaying records 1 to 10 of 44 records.
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1. A synchrotron beamline for extreme-ultraviolet photoresist testing
Published: 9/30/2011
Authors: Charles S Tarrio, Steven E Grantham, Shannon Bradley Hill, Nadir Sabirovich Faradzhev, Lee J Richter, Chester Knurek, Thomas B Lucatorto
Abstract: Before being used in an extreme-ultraviolet (EUV) scanner, photoresists must first be evaluated for sensitivity and tested to ensure that they will not contaminate the scanner optics. The new NIST facility described here provides data on the contami ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908231

2. SURF III: A flexible Synchrotron Radiation Source for Radiometry and Research
Published: 9/1/2011
Authors: Uwe Arp, Charles W Clark, Lu Deng, Nadir Sabirovich Faradzhev, Alex P. Farrell, Mitchell L. Furst, Steven E Grantham, Edward Walter Hagley, Shannon Bradley Hill, Thomas B Lucatorto, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
Abstract: The calculability of synchrotron radiation (SR) makes electron storage rings wonderful light sources for radiometry. The broadband nature of SR allows coverage of the whole spectral region from the x-ray to the far-infrared. Compact low-energy storag ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906750

3. The NIST EUV facility for advanced photoresist qualification using the witness-sample test
Published: 8/29/2011
Authors: Steven E Grantham, Charles S Tarrio, Shannon Bradley Hill, Lee J Richter, Thomas B Lucatorto, J. van Dijk, C. Kaya, N. Harned, R. Hoefnagels, M. Silova, J. Steinhoff
Abstract: Before being used in an extreme-ultraviolet (EUV) scanner, photoresists must first be qualified to ensure that they will not excessively contaminate the scanner optics or other parts of the vacuum environment of the scanner. At the National Institute ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908029

4. Transmission grating based EUV imaging spectrometer for time and space resolved impurity measurements
Published: 10/31/2010
Authors: Charles S Tarrio, Steven E Grantham, D Kumar, D Stutman, K Tritz, M Finkenthal, NSTX Team N/A
Abstract: A free standing transmission grating based imaging spectrometer in the extreme ultraviolet (EUV)range has been developed for the National Spherical Torus Experiment (NSTX). The spectrometer operates in a survey mode covering the approximate spectral ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905975

5. Design considerations for a cascaded grating interferometer suitable for EUV interference lithography
Published: 4/10/2009
Authors: Zachary H Levine, Thomas B Lucatorto, Steven E Grantham
Abstract: The potential of a cascaded grating interferometer to perform Extreme Ultraviolet Interference Lithography (EUV-IL) depends on its beng coupled to a source that is bright enought to allow exposures ina reasonable time.   This work presents a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842467

6. Measuring Pulse Energy With Solid-State Photodiodes
Published: 4/10/2009
Authors: Robert Edward Vest, Shannon Bradley Hill, Steven E Grantham
Abstract: With the advent of extreme ultraviolet lithography (EUVL) the measurement of the energy contained in pulses of short-wavelength radiation is becoming increasingly important. Even low average power sources can deliver pulses of radiation with high pea ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840222

7. A Low Cost Fiducial Reference for Computed Tomography
Published: 11/11/2008
Authors: Zachary H Levine, Steven E Grantham, Daniel S Sawyer, Anthony P Reeves, David F Yankelevitz
Abstract: Rationale and Objectives. To detect the growth in lesions, it is necessary to ensure that the apparent changes in size are above the noise floor of the system. By introducing a fiducial reference, it may be possible to detect smaller changes in le ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842437

8. EUV testing of multilayer mirrors: critical issues
Published: 1/1/2006
Authors: Shannon Bradley Hill, I Ermanoski, Steven E Grantham, Charles S Tarrio, Thomas B Lucatorto, T. E Madey, S Bajt, M Chandhok, P Yan, Obert Wood, S Wurm, N V Edwards
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101847

9. Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography,
Published: 1/1/2006
Authors: M Nieto, J P Allain, V Titov, M R Hendricks, A Hassanein, D Rokusek, C Chrobak, Charles S Tarrio, Yaniv Barad, Steven E Grantham, Thomas B Lucatorto, Bryan Rice
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101650

10. NIST VUV Metrology Programs to Support Space Based Research,
Published: 1/1/2006
Authors: Robert Edward Vest, Yaniv Barad, Mitchell L. Furst, Steven E Grantham, Charles S Tarrio, Ping-Shine Shaw
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101784



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