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Author: john gillen

Displaying records 51 to 60 of 84 records.
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51. Negative Cesium Sputter Ion Source for Generating Cluster Primary Ion Beams for Secondary Ion Mass Spectrometry Analysis
Published: 4/1/2001
Authors: John G Gillen, R Lance King, B Freibaum, R Lareau, J Bennett, F Chmara
Abstract: The use of a cluster (or polyatomic) primary ion projectile for organic SIMS has been demonstrated to increase the yield of characteristic molecular secondary ions, more efficiently desorb higher molecular weight species and reduce the accumulation o ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831137

52. Cluster Primary Ion Beam Secondary Ion Mass Spectrometry for Semiconductor Characterization
Published: 1/1/2001
Authors: John G Gillen, S V. Roberson, Albert J. Fahey, Marlon L Walker, J Bennett, R Lareau
Abstract: We are evaluating the use of polyatomic and cluster primary ion beams for characterization of semiconductor materials by secondary ion mass spectrometry using both magnetic sector and time-of-flight SIMS instruments. Primary ion beams of SF^d5^+, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831200

53. High Temperature Materials for Thin-Film Thermocouples on Silicon Wafers
Published: 11/1/2000
Authors: Kenneth Gruber Kreider, John G Gillen
Abstract: We Have developed an instrumented calibration wafer for radiometric temperature measurements in rapid thermal processing (RPT) tools for semiconductor processing. The instrumented wafers have sputter deposited thin-film thermocouples to minimize th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830660

54. Characterization of the Electron Beam Specimen Interaction in the ESEM with SIM Imaging
Published: 7/1/2000
Authors: Scott A Wight, John G Gillen, G B. Saupe
Abstract: A Secondary Ion Mass Spectrometry (SIMS) study has been undertaken to examine surfaces and films modified in the environmental scanning electron microscope (ESEM). Examination of the modifications induced by ESEM electrons and ions lead to a better ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830163

55. Channeling-Induced Asymmetric Distortion of Depth Profiles from Polycrystalline-TiN/Ti/TiN(001) Trilayers During Secondary Ion Mass Spectrometry
Published: 5/1/2000
Authors: G Ramanath, J E Greene, I Petrov, J E Baker, L H Allen, John G Gillen
Abstract: Asymmetric depth profiles of elemental and molecular secondary ions are observed during secondary ion mass spectrometry (SIMS) analyses of polycrystalline-TiN/Ti/TiN(001) trilayers using a Cs+ ion beam. The sputter-etching rate R and the secondary i ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831134

56. Thin-Film Calibration Wafer Materials for RTP Temperature Measurement
Published: 7/1/1999
Authors: Kenneth Gruber Kreider, John G Gillen
Abstract: We are developing an instrumented calibration wafer for radiometric temperature measurements that uses thin-film thermocouples to minimize the thermal disturbance of the wafer by the sensors. The thin-film thermocouples are sputter deposited on a the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830642

57. Development of a Triplasmatron Ion Source for the Generation of SF^d5^+ and F- Primary Ion Beams on an Ion Microscope Secondary Ion Mass Spectrometry Instrument
Published: 5/1/1999
Authors: John G Gillen, R Lance King, F Chmara
Abstract: A hot filament duoplasmatron ion source operating with argon has been modified by addition of an enclosed expansion cup mounted to the extraction side of the duoplasmatron anode. Using sulfur hexafluoride (SF^d6^) as a feed gas, this triplasmatron i ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831074

58. Elemental and Molecular Imaging of Human Hair Using Secondary Ion Mass Spectrometry
Published: 4/1/1999
Authors: John G Gillen, S V. Roberson, C M. Ng, M Stranick
Abstract: Secondary ion mass spectrometry (SIMS) is used to image the spatial distribution of elemental and molecular species on the surface and in cross-sections of doped human hair using a magnetic sector SIMS instrument operated as an ion microprobe. Analy ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831098

59. Preliminary Evaluation of an SF5+ Polyatomic Primary Ion Beam for Analysis of Organic Thin Films by Secondary Ion Mass Spectrometry
Published: 12/1/1998
Authors: John G Gillen, S V. Roberson
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100651

60. Quantitative secondary ion mass spectrometry imaging of self-assembled monolayer films for electron beam dose mapping in the environmental scanning electron microscope
Published: 7/1/1998
Authors: John G Gillen, Scott A Wight, David S. Bright, T M. Herne
Abstract: Fluorinated alkanethiol self assembled monolayers (SAM) films immobilized on gold substrates have been used as electron-sensitive resists to map quantitatively the spatial distribution of the primary electron beam scattering in an environmental scann ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831060



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