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Author: jon geist
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1. Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable
Published: 5/14/2014
Authors: Janet M Cassard, Jon C Geist, John A Kramar
Abstract: The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods. A Reference Material can be defined as a material whose property values ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914939

2. Method for Measuring Axis Orthogonality in MEMS Accelerometers
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 7925
Published: 7/15/2013
Authors: Craig Dyer McGray, Muhammad Yaqub Afridi, Jon C Geist
Abstract: A method is described for the computation of axis orthogonality errors in 3-axis accelerometers, based on the application of gravitational force at known angles. A precision two-axis articulated gimbal system is used to control the angle at which ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913262

3. A localized transition in the size variation of circular DNA in nanofluidic slitlike confinement
Published: 4/15/2013
Authors: Elizabeth A Strychalski, Samuel M Stavis, Jon C Geist
Abstract: We report strong evidence for a localized transition in the size variation of circular DNA between strong and moderate regimes of slitlike confinement. A novel and rigorous statistical analysis was applied to our recent experimental measurements ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910964

4. The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)
Published: 3/27/2013
Authors: Janet M Cassard, Jon C Geist, Craig Dyer McGray, Richard A Allen, Muhammad Yaqub Afridi, Brian Joseph Nablo, Michael Gaitan, David G Seiler
Abstract: This paper presents an overview of the Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM), which is a single test chip with test structures from which material and dimensional properties are obtained using five documentary standard ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912229

5. FABRICATION AND CHARACTERIZATION OF STANDARDS FOR ATOMIC FORCE MICROSCOPE TIP WIDTH CALIBRATION
Published: 3/25/2013
Authors: Ronald G Dixson, Craig Dyer McGray, Boon Ping Ng, Ndubuisi George Orji, Jon C Geist
Abstract: The National Institute of Standards and Technology (NIST) has been developing methods and standards to enable the traceable calibration of critical dimension atomic force microscopy (CD AFM). This technique involves flared tips and two-dimensional s ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912865

6. Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy
Published: 3/25/2013
Authors: Craig Dyer McGray, Samuel M Stavis, Jon C Geist
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912891

7. User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition
Series: Special Publication (NIST SP)
Report Number: 260-177
Published: 2/15/2013
Authors: Janet M Cassard, Jon C Geist, Theodore Vincent Vorburger, David Thomas Read, Michael Gaitan, David G Seiler
Abstract: The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910746

8. MEMS Kinematics by Super-Resolution Fluorescence Microscopy
Published: 9/27/2012
Authors: Craig Dyer McGray, Samuel M Stavis, Joshua Giltinan, Eric Eastman, Samara L. Firebaugh, Jenelle Piepmeier, Jon C Geist, Michael Gaitan
Abstract: Super-resolution fluorescence microscopy is used for the first time to study the nanoscale kinematics of a MEMS device in motion across a surface. A device under test is labeled with fluorescent nanoparticles that form a microscale constellation of n ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910908

9. Robust Auto-Alignment Technique for Orientation-Dependent Etching of Nanostructures
Published: 5/29/2012
Authors: Craig Dyer McGray, Richard J Kasica, Ndubuisi George Orji, Ronald G Dixson, Michael W Cresswell, Richard A Allen, Jon C Geist
Abstract: A robust technique is presented for auto-aligning nanostructures to slow-etching crystallographic planes in materials with diamond cubic structure. Lithographic mask patterns are modified from the intended dimensions of the nanostructures to compen ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908076

10. The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Published: 3/21/2012
Authors: Janet M Cassard, Jon C Geist, Michael Gaitan, David G Seiler
Abstract: The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documen ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910317



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