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1. The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)
Published: 3/27/2013
Authors: Janet M Cassard, Jon C Geist, Craig Dyer McGray, Richard A Allen, Muhammad Yaqub Afridi, Brian Joseph Nablo, Michael Gaitan, David G Seiler
Abstract: This paper presents an overview of the Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM), which is a single test chip with test structures from which material and dimensional properties are obtained using five documentary standard ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912229

2. User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition
Series: Special Publication (NIST SP)
Report Number: 260-177
Published: 2/15/2013
Authors: Janet M Cassard, Jon C Geist, Theodore Vincent Vorburger, David Thomas Read, Michael Gaitan, David G Seiler
Abstract: The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910746

3. MEMS Kinematics by Super-Resolution Fluorescence Microscopy
Published: 9/28/2012
Authors: Craig Dyer McGray, Samuel M Stavis, Joshua Giltinan, Eric Eastman, Samara L. Firebaugh, Jenelle Piepmeier, Jon C Geist, Michael Gaitan
Abstract: Super-resolution fluorescence microscopy is used for the first time to study the nanoscale kinematics of a MEMS device in motion across a surface. A device under test is labeled with fluorescent nanoparticles that form a microscale constellation of n ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910908

4. Robust Auto-Alignment Technique for Orientation-Dependent Etching of Nanostructures
Published: 5/29/2012
Authors: Craig Dyer McGray, Richard J Kasica, Ndubuisi George Orji, Ronald G Dixson, Michael W Cresswell, Richard A Allen, Jon C Geist
Abstract: A robust technique is presented for auto-aligning nanostructures to slow-etching crystallographic planes in materials with diamond cubic structure. Lithographic mask patterns are modified from the intended dimensions of the nanostructures to compen ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908076

5. The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Published: 3/21/2012
Authors: Janet M Cassard, Jon C Geist, Michael Gaitan, David G Seiler
Abstract: The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documen ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910317

6. Traceable Calibration of a Critical Dimension Atomic Force Microscope
Published: 3/9/2012
Authors: Ronald G Dixson, Ndubuisi George Orji, Craig Dyer McGray, John E Bonevich, Jon C Geist
Abstract: The National Institute of Standards and Technology (NIST) has a multifaceted program in atomic force microscope (AFM) dimensional metrology. One component of this program, and the focus of this paper, is the use of critical dimension atomic force ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908943

7. Quantitative Measurements of the Size Scaling of Linear and Circular DNA in Nanofluidic Slitlike Confinement
Published: 2/14/2012
Authors: Elizabeth A Strychalski, Jon C Geist, Michael Gaitan, Laurie E Locascio, Samuel M Stavis
Abstract: Quantitative size measurements of single linear and circular DNA molecules in nanofluidic slitlike confinement are reported. A novel experimental method using DNA entropophoresis down a nanofluidic staircase implemented comprehensive variation of sl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908052

8. DNA Molecules Descending a Nanofluidic Staircase by Entropophoresis
Published: 1/26/2012
Authors: Samuel M Stavis, Jon C Geist, Michael Gaitan, Laurie E Locascio, Elizabeth A Strychalski
Abstract: A complex entropy gradient for confined DNA molecules was engineered for the first time. Following the second law of thermodynamics, this enabled the directed self-transport and self-concentration of DNA molecules. This new nanofluidic method is term ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908034

9. MICROHOTPLATE TEMPERATURE SENSOR CALIBRATION AND BIST
Published: 1/3/2012
Authors: Muhammad Yaqub Afridi, Christopher B Montgomery, Stephen Semancik, Kenneth Gruber Kreider, Jon C Geist
Abstract: In this paper we describe a novel long-term microhotplate temperature sensor calibration technique suitable for Built-In Self Test (BIST). The microhotplate thermal resistance (thermal efficiency) and the thermal voltage from an integrated platinum-r ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907855

10. DNA ENTROPOPHORESIS: A BALANCE OF ENTROPY AND DIFFUSION IN COMPLEX NANOCONFINEMENT
Published: 10/3/2011
Authors: Samuel M Stavis, Jon C Geist, Michael Gaitan, Laurie E Locascio, Elizabeth A Strychalski
Abstract: Entropophoresis – motion caused by an entropy gradient – is a novel nanofluidic method to direct the self-transport of biopolymers that established a new paradigm of nanofluidic functionality with broad relevance to lab-on-a-chip technol-ogy. He ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909168