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1. Fracture strength of micro- and nano-scale silicon components
Published: 5/13/2015
Authors: Frank W DelRio, Robert Francis Cook, Brad Boyce
Abstract: Silicon devices are ubiquitous in many micro- and nano-scale technological applications, most notably microelectronics and microelectromechanical systems (MEMS). Despite their widespread usage, however, issues related to uncertain mechanical reliabi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=917944

2. Design and test of reliable, high strength, ingressive polycrystalline silicon microgripper arrays
Published: 1/2/2015
Authors: Siddharth Hazra, J L Beuth, Grant A Myers, Frank W DelRio, Maarten de Boer
Abstract: We present the design and extensive validation of a micromachined gripper array that enables reliable transmission of forces up to 10 milliNewtons. The gripper is constructed with polycrystalline silicon, a brittle material. Two ingressive snap-a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=916443

3. Stress mapping of micromachined polycrystalline silicon devices via confocal Raman microscopy
Published: 6/15/2014
Authors: Grant A Myers, Siddharth Hazra, Maarten de Boer, Chris A Michaels, Stephan J Stranick, Ryan P. Koseski, Robert Francis Cook, Frank W DelRio
Abstract: Stress mapping of micromachined polycrystalline silicon devices with components in various levels of uniaxial tension was performed. Confocal Raman microscopy was used to form two-dimensional maps of Raman spectral shifts, which exhibited variations ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915909

4. Controlled Formation and Characterization of Dithiothreitol-Conjugated Gold Nanoparticle Clusters
Published: 3/5/2014
Authors: De-Hao D. Tsai, Tae Joon Cho, Frank W DelRio, Justin M Gorham, Jiwen Zheng, Jiaojie Tan, Michael Russel Zachariah, Vincent A Hackley
Abstract: We report a systematic study of the controlled formation of discrete-size gold nanoparticle clusters (GNCs) by interaction with the reducing agent dithiothreitol (DTT). Asymmetric-flow field flow fractionation and electrospray differential mobility a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915014

5. Frictional properties of native and functionalized type I collagen thin films
Published: 10/2/2013
Authors: Koo-hyun Chung, Antony Chen, Christopher Anderton, Kiran Bhadriraju, Anne L Plant, Brian G Bush, Robert Francis Cook, Frank W DelRio
Abstract: Frictional properties of native and fibronectin (FN)-functionalized type I collagen (COL) thin films were studied via atomic force microscopy. The COL lateral contact stiffness was dependent only on the hydration state, indicating that shear deformat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914307

6. Decoupling small-scale roughness and long-range features on deep reactive ion etched silicon surfaces
Published: 9/19/2013
Authors: Frank W DelRio, Lawrence H Friedman, Michael S. Gaither, William A Osborn, Robert Francis Cook
Abstract: Roughness scaling of three different deep reactive ion etched (DRIE) silicon surfaces is investigated using atomic force microscopy. At small distances, height-height correlations H reveal power-law behavior with equal scaling exponents for all surf ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913812

7. Temperature-Programmed Electrospray-Differential Mobility Analysis for Characterization of Ligated Nanoparticles in Complex Media
Published: 8/12/2013
Authors: De-Hao D. Tsai, Frank W DelRio, John M Pettibone, Pin Ann Lin, Jiaojie Tan, Michael Russel Zachariah, Vincent A Hackley
Abstract: In this study, an electrospray-differential mobility analyzer (ES-DMA) was operated with an aerosol flow-mode, temperature-programmed approach to enhance its ability to characterize the particle size distributions (PSDs) of nanoscale particles (NPs) ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913860

8. On the bending strength of single-crystal silicon theta-like specimens
Published: 7/10/2013
Authors: Rebecca R. Kirkpatrick, William A Osborn, Michael S. Gaither, Richard Swift Gates, Frank W DelRio, Robert Francis Cook
Abstract: A new theta geometry was developed for micro-scale bending strength measurements. The new ,gapŠ theta specimen was a simple modification of the arch theta specimen that enabled micro-scale tensile testing. The gap theta was demonstrated here on sin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913369

9. Effect of Organic SAMs on the Evolution of Strength of Silicon Nanostructures
Published: 6/3/2013
Authors: Scott Grutzik, Brian G Bush, Frank W DelRio, Richard Swift Gates, Melissa Hines, Alan Zehnder
Abstract: The ability to accurately predict the strength of nanoscale, single crystal structures is critical in micro- and nano-electromechanical systems (MEMS and NEMS) design. Because of the small length scales involved failure does not always follow the sam ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913502

10. Etching process effects on surface structure, fracture strength, and reliability of single-crystal silicon theta-like specimens
Published: 5/30/2013
Authors: Michael S. Gaither, Richard Swift Gates, Rebecca R. Kirkpatrick, Robert Francis Cook, Frank W DelRio
Abstract: The etching processes used to produce microelectromechanical systems (MEMS) leave residual surface features that typically limit device strength and, consequently, device lifetime and reliability. In order to optimize MEMS device reliability, it is ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912389



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