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Author: john dagata

Displaying records 11 to 20 of 64 records.
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11. Lithography With Self-Assembled Copolymer Microdomains
Published: 1/1/2004
Authors: C Harrison, John A. Dagata, P Adamson
Abstract: There are many research groups working on copolymer lithography;many more have expressed interest in joining the field.Researchers who are new to this area will find the broad reviewof copolymer thin films by Fasolka and Mayes to be a highlyvaluable ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852143

12. Lithography with Self-Assembled Block Copolymer Microdomains
Published: 1/1/2004
Authors: C Harrison, John A. Dagata, P Adamson
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853929

13. Faradaic Current Detection During Anodic Oxidation of the H-Passivated p-Si(001) Surface with Controlled Relative Humidity
Published: 12/19/2003
Authors: H Kuramochi, F Perez-murano, John A. Dagata, H Yokoyama
Abstract: Faradaic current during anodic oxidation is measured over a relative humidity range of 40¿70% using an atomic force microscope with humidity control. The level of detected current during the fabrication of oxide dots on H-passivated Si(001) is in the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822242

14. Nanoscale Oxidation of Zirconium Surfaces: Kinetics and Mechanisms
Published: 7/1/2003
Authors: Natalia Farkas, Li Zhang, E A Evans, R Ramsier, John A. Dagata
Abstract: We show that AFM-induced oxide features can be reproducibly formed on both Zr and ZrN surfaces, and that the growth rate decreases rapidly with increasing time. There is an increase in oxide-feature height with humidity for both systems, and an appro ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821960

15. Workshop Summary Report: Scanning Probe Nanolithography Workshop
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 7040
Published: 1/1/2003
Authors: John A. Dagata, H Yokoyama, F Perez-murano
Abstract: A workshop on Scanning Probe Microscope (SPM)-based Nanolithography was held at NIST Gaithersburg on November 24-25, 2003.  The meeting was sponsored by the Precision Engineering Division, Manufacturing Engineering Laboratory, NIST, under a Rese ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823167

16. Silicon Nanostructures Fabricated by Scanning Probe Oxidation and Tetramethyl Ammonium Hydroxide Etching
Published: 6/15/2002
Authors: F S Chien, W F Hsieh, S Gwo, Andras Vladar, John A. Dagata
Abstract: Fabrication of silicon nanostructures is a key technique for the development of monolithically integrated optoelectronic circuits. We demonstrate that the process of scanning probe lithography (SPL) and anisotropic TMAH etching is a low-cost and reli ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821774

17. Silicon Nanostructures Fabricated by Scanning Probe Lithography and TMAH Etching
Published: 1/1/2002
Authors: F S Chien, W F Hsieh, S Gwo, Andras Vladar, John A. Dagata
Abstract: Fabrication of silicon nanostructures is a key technique for the development of monolithically integrated optoelectronic circuits. We demonstrate that the process of scanning probe lithography (SPL) and anisotropic TMAH etching is a low-cost and rel ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823149

18. Nanomachining of Si with Si3N4 Masks Patterned by Scanning
Published: 11/1/2001
Authors: F S Chien, John A. Dagata, W F Hsieh, S Gwo
Abstract: We demonstrate that local oxidation of silicon nitride films deposited on conductive substrates with a conductive-probe atomic force microscope (AFM) is a very promising approach for nanofabrication. Scanning Auger microscopy and spectroscopy are emp ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821690

19. Electric Force Microscopy with a Single Carbon Nanotube Tip
Published: 8/1/2001
Authors: John A. Dagata, F S Chien, S Gwo, K Morimoto, T Inoue, J Itoh, H Yokoyama
Abstract: Carbon nanotube tips offer a significant improvement over standard scanned probe microscope (SPM) tips for electrical characterization of nanodevice structures. Carbon nanotube tips are compatible with requirements for integrated SPM probe station in ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821581

20. Lateral SiO^dx^ Tunnel Barrier Formation for Si-Based Tunnel Transistor Using Scanned Probe Oxidation
Published: 11/1/2000
Authors: K Morimoto, K Morita, K Ohnaka, John A. Dagata
Abstract: Tunneling transistors designed with a lateral tunnel barrier between source and drain electrodes have attracted much attention recently as an approach to silicon-compatible nanoelectronics (1). In order to realize this device, the lateral tunneling ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823131