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Author: robert cook

Displaying records 31 to 40 of 51 records.
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31. Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy
Published: 9/14/2009
Authors: Gheorghe Stan, Sean King, Robert Francis Cook
Abstract: Correlated force and contact-resonance versus displacement responses have been resolved using load-dependent contact-resonance atomic force microscopy (AFM) to determine the elastic modulus of low-k dielectric thin films. The measurements consisted ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902329

32. Stress-Intensity Factor and Toughness Measurement at the Nanoscale using Confocal Raman Microscopy
Published: 7/12/2009
Authors: Robert Francis Cook, Yvonne Beatrice Gerbig, Mark D Vaudin, Jeroen Schoenmaker, Stephan J Stranick
Abstract: A confocal Raman microscopy technique is presented that allows stress measurement at the nanoscale, which in turn enables measurement of stress-intensity factors (SIF) at crack tips and thus toughness to be estimated. Peak-fitting and super-resolutio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=900910

33. Fracture toughness measurement of thin nanoporous films on stiff substrates
Published: 6/15/2009
Authors: Dylan Morris, Robert Francis Cook
Abstract: Nanoporous low-dielectric-constant films constitute a class of materials that are plagued by fracture concerns and are not amenable to traditional fracture toughness measurement techniques. An indentation fracture toughness measurement technique has ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=900922

34. Elastic and adhesive properties of alkanethiol self-assembled monolayers on gold
Published: 3/30/2009
Authors: Frank W DelRio, Cherno Jaye, Daniel A Fischer, Robert Francis Cook
Abstract: Elastic and adhesive properties of alkanethiol (CH3(CH2)n 1SH) self-assembled monolayers on gold are investigated by atomic force microscopy and correlated with surface structure via near edge x-ray absorption fine structure spectroscopy. As the cha ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901545

35. Effect of crystallographic orientation on phase transformations during indentation of silicon
Published: 3/9/2009
Authors: Yvonne Beatrice Gerbig, Dylan Morris, Stephan J Stranick, Mark D Vaudin, Robert Francis Cook
Abstract: In a statistical nanoindentation study using a spherical probe, the effect of crystallographic orientation on the phase transformation of silicon (Si) was investigated. The presence and pressure at which events associated with phase transformation oc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854143

36. Elastic Modulus of Faceted Aluminum Nitride Nanotubes Measured by Contact Resonance Atomic Force Microscopy
Published: 12/17/2008
Authors: Gheorghe Stan, C Ciobanu, Timothy Thayer, George Wang, Randall Creighton, Premsagar Purushotham Kavuri, Leonid A Bendersky, Robert Francis Cook
Abstract: A new methodology for determining the radial elastic modulus of a one-dimensional nanostructure laid on a substrate has been developed. The methodology consists of the combination of contact resonance atomic force microscopy (AFM) with finite element ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854145

37. Comparison of Nanoscale Measurements of Strain and Stress using Electron Back Scattered Diffraction and Confocal Raman Microscopy
Published: 12/12/2008
Authors: Mark D Vaudin, Yvonne Beatrice Gerbig, Stephan J Stranick, Robert Francis Cook
Abstract: Strains in Si as small as 104 (corresponding to stresses of 10 MPa) have been measured using electron back scatter diffraction (EBSD), with spatial resolution close to 10 nm, and confocal Raman microscopy (CRM) with spatial resolution app ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854129

38. Indentation Fracture of Low Dielectric Constant Films, Part I. Experiments and Observations
Published: 12/12/2008
Authors: Dylan Morris, Robert Francis Cook
Abstract: Advanced microelectronic interconnection structures will need dielectrics of low permittivity to reduce capacitive delays and crosstalk; but this reduction in permittivity typically necessitates an increase in free volume of the material, which is fr ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851099

39. Mapping the Elastic Properties of Granular Au Films by Contact Resonance Atomic Force Microscopy
Published: 11/13/2008
Authors: Gheorghe Stan, Robert Francis Cook
Abstract: Endowed with nanoscale spatial resolution, contact resonance atomic force microscopy (CR-AFM) provides extremely localized elastic property measurements. We advance here the applicability of CR-AFM on surfaces with nanosize features by considering th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853572

40. Indentation Fracture of Low Dielectric Constant Films, Part II. Indentation Fracture Mechanics Model
Published: 9/12/2008
Authors: Dylan Morris, Robert Francis Cook
Abstract: Part I of this two-part work explored the instrumented-indentation and fracture phenomena of compliant, low dielectric constant (low-k) films on silicon substrates. The effect of film thickness and probe acuity on the fracture response, as well as th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851100



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