NIST logo

Publications Portal

You searched on:
Author: wei chu

Displaying records 11 to 20.
Resort by: Date / Title


11. An Iterative Image Registration Algorithm by Optimizing Similarity Measurement
Published: 1/1/2010
Authors: Wei Chu, Li Ma, Jun-Feng Song, Theodore Vincent Vorburger
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903937

12. An Improved Digital Image Correlation Method Applied to Scanning Probe Microscope Images
Published: 10/1/2009
Authors: Wei Chu, Joseph Fu, Theodore Vincent Vorburger
Abstract: Digital image correlation (DIC) is a method for measuring the surface displacements and displacement gradients in materials under deformation. During the calculation, the traditional DIC method directly uses the intensity values of compared images an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903160

13. Influence of room temperature control system on AFM imaging
Published: 10/1/2009
Authors: Joseph Fu, Wei Chu, Theodore Vincent Vorburger
Abstract: As technology progresses, the control of environment for experiments is also getting more sophisticated; such as the control of lab temperature and vibration. Temperature controlled within ± 0.25° C for a general purpose lab is common place. We illus ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901426

14. A moving window correlation method to reduce the distortion of SPM images
Published: 8/20/2009
Authors: Wei Chu, Joseph Fu, Ronald G Dixson, Ndubuisi George Orji, Theodore Vincent Vorburger
Abstract: Many scanning probe microscopes (SPMs), such as the scanning tunneling microscope (STM) and atomic force microscope (AFM), use piezoelectric actuators operating in open loop for generating the scans of the surfaces. However, nonlinearities mainly cau ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901732

15. Nano- and Atomic-Scale Length Metrology
Published: 12/14/2007
Authors: Theodore Vincent Vorburger, Ronald G Dixson, Joseph Fu, Ndubuisi George Orji, Shaw C Feng, Michael W Cresswell, Richard A Allen, William F Guthrie, Wei Chu
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824603

16. 3D Image Correction of Tilted Sample Through Coordinate Transformation
Published: 1/1/2007
Authors: Wei Chu, Joseph Fu, Ronald G Dixson, Theodore Vincent Vorburger
Abstract: In scanned probe measurements of micrometer- or nanometer-scale lines, it is nearly impossible to maintain the sample in a perfectly level position, and even a small amount of tilt angle can contribute to the accuracy of the result of measurand such ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823244

17. Linewidth Measurement Based on Automatically Matched and Stitched Images
Published: 1/1/2007
Authors: Wei Chu, Joseph Fu, Ronald G Dixson, Theodore Vincent Vorburger
Abstract: The emergence of ultra-sharp carbon nanotube (CNT) tips provides a new approach to minimize the distortion of the measured linewidth profile caused by interaction with the fmite probe tip size. However, the inevitable tilt angle resulting from attach ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824614

18. Nano- and Atomic-Scale Length Metrology
Published: 1/1/2006
Authors: Theodore Vincent Vorburger, Ronald G Dixson, Joseph Fu, Ndubuisi George Orji, Shaw C Feng, Michael W Cresswell, Richard A Allen, William F Guthrie, Wei Chu
Abstract: We discuss nano-scale length metrology of linewidth, step height, and line edge roughness (LER). These properties are of growing importance to the function and specification of semiconductor devices as the dimensions of semiconductor devices shrink t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823216

19. An Image Stitching Method to Eliminate the Distortion of the Sidewall in Linewidth Measurement
Published: 5/1/2004
Authors: Xuezeng Zhao, Joseph Fu, Wei Chu, C V Nguyen, Theodore Vincent Vorburger
Abstract: Nano-scale linewidth measurements are performed in semiconductor manufacturing, the data storage industry, and micro-mechanical engineering. It is well known that the interaction of probe and sample affects the measurement accuracy of linewidth measu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822153

20. Study on an Image Stitching Method for Linewidth Measurement
Published: 4/1/2004
Authors: Wei Chu, Xuezeng Zhao, Joseph Fu, Theodore Vincent Vorburger
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822240



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series