Publications Portal

You searched on:
Author: wei chu

Displaying records 11 to 18.
Resort by: Date / Title

11. Influence of room temperature control system on AFM imaging
Published: 10/1/2009
Authors: Joseph Fu, Wei Chu, Theodore Vincent Vorburger
Abstract: As technology progresses, the control of environment for experiments is also getting more sophisticated; such as the control of lab temperature and vibration. Temperature controlled within ± 0.25° C for a general purpose lab is common place. We illus ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901426

12. A moving window correlation method to reduce the distortion of SPM images
Published: 8/20/2009
Authors: Wei Chu, Joseph Fu, Ronald G Dixson, Ndubuisi George Orji, Theodore Vincent Vorburger
Abstract: Many scanning probe microscopes (SPMs), such as the scanning tunneling microscope (STM) and atomic force microscope (AFM), use piezoelectric actuators operating in open loop for generating the scans of the surfaces. However, nonlinearities mainly cau ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901732

13. Nano- and Atomic-Scale Length Metrology
Published: 12/14/2007
Authors: Theodore Vincent Vorburger, Ronald G Dixson, Joseph Fu, Ndubuisi George Orji, Shaw C Feng, Michael W Cresswell, Richard A Allen, William F Guthrie, Wei Chu
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824603

14. 3D Image Correction of Tilted Sample Through Coordinate Transformation
Published: 1/1/2007
Authors: Wei Chu, Joseph Fu, Ronald G Dixson, Theodore Vincent Vorburger
Abstract: In scanned probe measurements of micrometer- or nanometer-scale lines, it is nearly impossible to maintain the sample in a perfectly level position, and even a small amount of tilt angle can contribute to the accuracy of the result of measurand such ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823244

15. Linewidth Measurement Based on Automatically Matched and Stitched Images
Published: 1/1/2007
Authors: Wei Chu, Joseph Fu, Ronald G Dixson, Theodore Vincent Vorburger
Abstract: The emergence of ultra-sharp carbon nanotube (CNT) tips provides a new approach to minimize the distortion of the measured linewidth profile caused by interaction with the fmite probe tip size. However, the inevitable tilt angle resulting from attach ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824614

16. Nano- and Atomic-Scale Length Metrology
Published: 1/1/2006
Authors: Theodore Vincent Vorburger, Ronald G Dixson, Joseph Fu, Ndubuisi George Orji, Shaw C Feng, Michael W Cresswell, Richard A Allen, William F Guthrie, Wei Chu
Abstract: We discuss nano-scale length metrology of linewidth, step height, and line edge roughness (LER). These properties are of growing importance to the function and specification of semiconductor devices as the dimensions of semiconductor devices shrink t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823216

17. An Image Stitching Method to Eliminate the Distortion of the Sidewall in Linewidth Measurement
Published: 5/1/2004
Authors: Xuezeng Zhao, Joseph Fu, Wei Chu, C V Nguyen, Theodore Vincent Vorburger
Abstract: Nano-scale linewidth measurements are performed in semiconductor manufacturing, the data storage industry, and micro-mechanical engineering. It is well known that the interaction of probe and sample affects the measurement accuracy of linewidth measu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822153

18. Study on an Image Stitching Method for Linewidth Measurement
Published: 4/1/2004
Authors: Wei Chu, Xuezeng Zhao, Joseph Fu, Theodore Vincent Vorburger
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822240