NIST logo

Publications Portal

You searched on:
Author: janet cassard
Sorted by: title

Displaying records 1 to 10 of 35 records.
Resort by: Date / Title


1. A Standard Method for Measuring Wafer Bond Strength for MEMS Applications
Published: 12/23/2008
Authors: Richard A Allen, Janet M Cassard, Winthrop A. Baylies, David Thomas Read, George David Quinn, Frank W DelRio, Kevin T. Turner, Michael Bernasch, Joerg Bagdahn
Abstract: A round robin, to provide precision and bias data for SEMI standard MS5-1107, Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures, in underway. The precision and bias data, combined with experience in applying the tes ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=33132

2. Analysis of Fixed-Fixed Beam Test Structures
Published: 12/31/1996
Authors: Janet M Cassard, David Thomas Read, Michael Gaitan
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10332

3. CMOS Foundry Implementation of Schottky Diodes for RF Detection
Published: 12/1/1996
Authors: V. Milanovic, Michael Gaitan, Janet M Cassard, Mona Elwakkad Zaghloul
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=14696

4. Color Supplement to NIST Special Publication 400-93: Semicondutor Measurement Technology: Design and Testing Guides for the CMOS and Lateral Bipolar-on-SOI Test Library
Series: NIST Interagency/Internal Report (NISTIR)
Published: 3/1/1994
Authors: Janet M Cassard, Mona Elwakkad Zaghloul
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10592

5. Critical Dimension Metrology for MEMS Processes Using Electrical Techniques
Published: 12/31/1996
Authors: Richard A Allen, Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=20769

6. Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS
Published: 12/31/1992
Authors: Michael Gaitan, A. Parameswaran, Mona Elwakkad Zaghloul, Janet M Cassard, Donald B. Novotny, John S Suehle
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2103

7. Electro-physical Technique for Post-fabrication Measurements of CMOS Process Layer Thicknesses
Series: Journal of Research (NIST JRES)
Published: 10/1/2007
Authors: Janet M Cassard, Paul T. Vernier
Abstract: This paper presents a combined physical and electrical post-fabrication method for determining the thicknesses of the various layers in a commercial 1.5-um complementary-metal-oxide-semiconductor (CMOS) foundry process available through MOSIS. Forty- ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=32592

8. High-Level CAD Melds Micromachined Devices with Foundries
Published: 11/1/1992
Authors: Janet M Cassard, M. Parameswaran, Mona Elwakkad Zaghloul, Michael Gaitan
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=13719

9. High-Level CAD Melds Micromachined Devices with Foundries
Series: NIST Interagency/Internal Report (NISTIR)
Published: 5/1/1992
Authors: Janet M Cassard, M. Parameswaran, Mona Elwakkad Zaghloul, Michael Gaitan
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=17856

10. MEMS Length and Strain Measurements Using an Optical Interferometer
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6779
Published: 8/21/2001
Author: Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30329



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series