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You searched on: Author: janet cassard Sorted by: title

Displaying records 1 to 10 of 36 records.
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1. A Standard Method for Measuring Wafer Bond Strength for MEMS Applications
Published: 12/23/2008
Authors: Richard A Allen, Janet M Cassard, Winthrop A. Baylies, David Thomas Read, George David Quinn, Frank W DelRio, Kevin T. Turner, Michael Bernasch, Joerg Bagdahn
Abstract: A round robin, to provide precision and bias data for SEMI standard MS5-1107, Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures, in underway. The precision and bias data, combined with experience in applying the tes ...

2. Analysis of Fixed-Fixed Beam Test Structures
Published: 12/31/1996
Authors: Janet M Cassard, David Thomas Read, Michael Gaitan

3. CMOS Foundry Implementation of Schottky Diodes for RF Detection
Published: 12/1/1996
Authors: V. Milanovic, Michael Gaitan, Janet M Cassard, Mona E. Zaghloul

4. Color Supplement to NIST Special Publication 400-93: Semicondutor Measurement Technology: Design and Testing Guides for the CMOS and Lateral Bipolar-on-SOI Test Library
Series: NIST Interagency/Internal Report (NISTIR)
Published: 3/1/1994
Authors: Janet M Cassard, Mona E. Zaghloul

5. Critical Dimension Metrology for MEMS Processes Using Electrical Techniques
Published: 12/31/1996
Authors: Richard A Allen, Janet M Cassard

6. Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS
Published: 12/31/1992
Authors: Michael Gaitan, A. Parameswaran, Mona E. Zaghloul, Janet M Cassard, Donald B. Novotny, John S Suehle

7. Electro-physical Technique for Post-fabrication Measurements of CMOS Process Layer Thicknesses
Series: Journal of Research (NIST JRES)
Published: 10/1/2007
Authors: Janet M Cassard, Paul T. Vernier
Abstract: This paper presents a combined physical and electrical post-fabrication method for determining the thicknesses of the various layers in a commercial 1.5-um complementary-metal-oxide-semiconductor (CMOS) foundry process available through MOSIS. Forty- ...

8. High-Level CAD Melds Micromachined Devices with Foundries
Published: 11/1/1992
Authors: Janet M Cassard, M. Parameswaran, Mona E. Zaghloul, Michael Gaitan

9. High-Level CAD Melds Micromachined Devices with Foundries
Series: NIST Interagency/Internal Report (NISTIR)
Published: 5/1/1992
Authors: Janet M Cassard, M. Parameswaran, Mona E. Zaghloul, Michael Gaitan

10. MEMS Length and Strain Measurements Using an Optical Interferometer
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6779
Published: 8/21/2001
Author: Janet M Cassard

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  • SP 250-XX: Calibration Services
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