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Author: janet cassard

Displaying records 21 to 30 of 35 records.
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21. New Optomechanical Technique for Measuring Layer Thickness in MEMS Processes, Journal of Microelectromechanical Systems
Published: 3/1/2001
Author: Janet M Cassard
Abstract: Dimensional metrology improvements are needed to achieve the fabrication of repeatable devices. This research presents a new optomechanical technique for measuring the thickness of a suspended material in two distinct microelectromechanical system ( ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=16356

22. Analysis of Fixed-Fixed Beam Test Structures
Published: 12/31/1996
Authors: Janet M Cassard, David Thomas Read, Michael Gaitan
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10332

23. Critical Dimension Metrology for MEMS Processes Using Electrical Techniques
Published: 12/31/1996
Authors: Richard A Allen, Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=20769

24. Measurements of Fracture Strength and Young's Modulus of Surface-Micromachined Polysilicon
Published: 12/31/1996
Authors: David Thomas Read, Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=6023

25. CMOS Foundry Implementation of Schottky Diodes for RF Detection
Published: 12/1/1996
Authors: V. Milanovic, Michael Gaitan, Janet M Cassard, Mona Elwakkad Zaghloul
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=14696

26. Realizing Suspended Structures on Chips Fabricated by CMOS Foundry Processes through the MOSIS Service
Series: NIST Interagency/Internal Report (NISTIR)
Published: 6/1/1994
Authors: Janet M Cassard, Michael Gaitan, Mona Elwakkad Zaghloul, Donald B. Novotny, V. C. Tyree, J. I Pi, C. Pina, W. Hansford
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=15490

27. Color Supplement to NIST Special Publication 400-93: Semicondutor Measurement Technology: Design and Testing Guides for the CMOS and Lateral Bipolar-on-SOI Test Library
Series: NIST Interagency/Internal Report (NISTIR)
Published: 3/1/1994
Authors: Janet M Cassard, Mona Elwakkad Zaghloul
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10592

28. Semiconductor Measurement Technology: Design and Testing Guides for the CMOS and Lateral Bipolar-on-SOI Test Library
Series: Special Publication (NIST SP)
Published: 3/1/1994
Authors: Janet M Cassard, Mona Elwakkad Zaghloul
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28728

29. The Design Guide for CMOS-on-SIMOX Test Chips NIST3 and NIST4
Series: NIST Interagency/Internal Report (NISTIR)
Published: 1/1/1993
Authors: Janet M Cassard, Michael W Cresswell, Colleen E. Hood, Loren W. Linholm, Peter Roitman, Mona Elwakkad Zaghloul
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=21343

30. The Test Guide for CMOS-on-SIMOX Test Chips NIST3 and NIST4
Series: NIST Interagency/Internal Report (NISTIR)
Published: 1/1/1993
Authors: Janet M Cassard, Michael W Cresswell, Colleen E. Hood, Loren W. Linholm, Peter Roitman
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=21846



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