NIST logo

Publications Portal

You searched on:
Author: richard allen
Sorted by: title

Displaying records 1 to 10 of 122 records.
Resort by: Date / Title


1. 2nd Annual Tri-National Workshop on Standards for Nanotechnology - (NIST presentations)
Published: 12/10/2008
Authors: Ronald G Dixson, Jon Robert Pratt, Vincent A Hackley, James Edward Potzick, Richard A Allen, Ndubuisi G. (Ndubuisi George) Orji, Michael T Postek, Herbert S Bennett, Theodore Vincent Vorburger, Jeffrey A Fagan, Robert L. Watters
Abstract: A new era of cooperation between North American National Measurement Institutes (NMIs) was ushered by the National Research Council of Canada Institute for National Measurement Standards (NRC-INMS) on February 7, 2007 when the first Tri-National wo ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824641

2. A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances
Published: 12/31/1991
Authors: Michael W Cresswell, Michael Gaitan, Richard A Allen, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=21586

3. A New Critical Dimension Metrology for Chrome-on-Glass Substrates Based ons-Parameter Measurements Extracted from Coplanar Waveguide Test Structures
Published: 10/1/2006
Authors: Chidubem Nwokoye, Mona Elwakkad Zaghloul, Michael W Cresswell, Richard A Allen, Christine E. Murabito
Abstract: In mask fabrication, Critical Dimension (CD) metrology is conducted by optical transmission, Scanning Electron Microscopy (SEM), and Atomic Force Microscopy (AFM) tools. All these have different advantages and limitations. The work reported here is t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=32422

4. A New Method to Measure the Distance Between Graduation Lines on Graduate Scales
Published: 12/1/2000
Authors: William B. Penzes, Richard A Allen, Michael W Cresswell, Loren W. Linholm, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8085

5. A New Method to Measure the Distance Between Graduation Lines on Graduate Scales
Published: 12/1/1999
Authors: William B. Penzes, Richard A Allen, Michael W Cresswell, Loren W. Linholm, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30330

6. A New Method to Measure the Distance Between Graduation Lines on Graduated Scales
Published: 12/31/1994
Authors: William B. Penzes, Richard A Allen, Michael W Cresswell, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28768

7. A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps
Published: 6/1/1992
Authors: Richard A Allen, Michael W Cresswell, Laurence M. Buck
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2121

8. A Novel Method for Fabricating CD Reference Materials with 100 nm Linewidths
Published: 12/31/2000
Authors: Richard A Allen, Loren W. Linholm, Michael W Cresswell, Colleen E. Hood
Abstract: A technique has been developed to fabricate 100-nm CD reference features with I-line lithography by utilizing a unique characteristic of single-crystal silicon-on-insulator films: Under certain etch conditions, the edges of features align to crystall ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=20631

9. A ROUND ROBIN EXPERIMENT TO PROVIDE PRECISION AND BIAS FOR SEMI MS5: TEST METHOD FOR WAFER BOND STRENGTH MEASUREMENTS USING MICRO-CHEVRON TEST STRUCTURES
Published: 12/7/2009
Authors: Richard A Allen, Winthrop A. Baylies, Paul Langer, Ralph Danzl, Frank W DelRio, Gavin Horn, Roy Knechtel, Michael Mattes, David Thomas Read, Sumant Sood, Kevin T. Turner
Abstract: An international round robin was organized to update SEMI Standard MS5: Test Method for Wafer Bond Strength Measurements using Micro-Chevron Test Structures. Results from the round robin allowed for inclusion of a Precision and Bias statement. The ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=904232

10. A Round Robin Experiment to Compare Methods to Measure Voids in Bonded Wafer Pairs
Published: 7/14/2010
Author: Richard A Allen
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906335



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series