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Author: richard allen

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121. Test Chip for the Evaluation of Surface Diffusion Phenomena in Sputtered Aluminum Planarization Processes
Published: 12/31/1991
Authors: M. A. Jones, John W. Roberts, Colleen E. Hood, Michael W Cresswell, Richard A Allen
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=4689

122. CMOS Process Monitor
Published: 12/31/1988
Authors: M. G. Buehler, Loren W. Linholm, V. C. Tyree, Richard A Allen, B. R. Blaes, K. A. Hicks, G. A. Jennings
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2892



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