Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).

View the beta site
NIST logo

Publications Portal

You searched on: Author: richard allen

Displaying records 111 to 120 of 126 records.
Resort by: Date / Title

111. Application of the Modified Voltage-Dividing Potentiometer to Overlay Metrology in a CMOS/Bulk Process
Published: 12/31/1994
Authors: Richard A Allen, Michael W. Cresswell, Loren W. Linholm, Jinsheng Wen, Colleen E. Hood, T. A. Hill, J. D. Benecke, S. R. Volk, H. D. Stewart

112. Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards
Published: 12/31/1994
Authors: Michael W. Cresswell, William B. Penzes, Richard A Allen, Loren W. Linholm, Colleen E. Hood, E Clayton Teague

113. Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology
Published: 12/31/1994
Authors: Loren W. Linholm, Richard A Allen, Michael W. Cresswell

114. New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology
Published: 8/1/1994
Authors: Michael W. Cresswell, Richard A Allen, Loren W. Linholm, Colleen E. Hood, William B. Penzes

115. National Institute of Standards and Technology (NIST) J93 Project Proposal Report
Published: 6/15/1994
Authors: Michael T Postek, Robert D. Larrabee, L Linholm, James Edward Potzick, J Schneir, T Mcwaid, Michael W. Cresswell, Richard A Allen, E Clayton Teague
Abstract: Unavailable.

116. An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes
Published: 12/31/1993
Authors: Richard A Allen, C. E. Schuster

117. Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System
Published: 12/31/1993
Authors: Michael W. Cresswell, Richard A Allen, C. H. Linholm, Colleen E. Hood, William B. Penzes, E Clayton Teague

118. Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies
Published: 9/1/1993
Authors: Richard A Allen, P. Troccolo, James C. OwenI II, James Edward Potzick, Michael T Postek, Loren W. Linholm

119. Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology
Published: 12/31/1992
Authors: Richard A Allen, Michael W. Cresswell

120. Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology
Published: 12/31/1992
Authors: Richard A Allen, Michael W. Cresswell, Colleen E. Hood, Loren W. Linholm

Search NIST-wide:

(Search abstract and keywords)

Last Name:
First Name:

Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series