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Author: richard allen

Displaying records 111 to 120 of 124 records.
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111. Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology
Published: 12/31/1994
Authors: Loren W. Linholm, Richard A Allen, Michael W Cresswell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=13045

112. New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology
Published: 8/1/1994
Authors: Michael W Cresswell, Richard A Allen, Loren W. Linholm, Colleen E. Hood, William B. Penzes
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10192

113. National Institute of Standards and Technology (NIST) J93 Project Proposal Report
Published: 6/15/1994
Authors: Michael T Postek, Robert D. Larrabee, L Linholm, James Edward Potzick, J Schneir, T Mcwaid, Michael W Cresswell, Richard A Allen, E Clayton Teague
Abstract: Unavailable.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820703

114. An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes
Published: 12/31/1993
Authors: Richard A Allen, C. E. Schuster
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=9939

115. Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System
Published: 12/31/1993
Authors: Michael W Cresswell, Richard A Allen, C. H. Linholm, Colleen E. Hood, William B. Penzes, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2991

116. Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies
Published: 9/1/1993
Authors: Richard A Allen, P. Troccolo, James C. OwenI, James Edward Potzick, Michael T Postek, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=29951

117. Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology
Published: 12/31/1992
Authors: Richard A Allen, Michael W Cresswell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=9226

118. Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology
Published: 12/31/1992
Authors: Richard A Allen, Michael W Cresswell, Colleen E. Hood, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3920

119. A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps
Published: 6/1/1992
Authors: Richard A Allen, Michael W Cresswell, Laurence M. Buck
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2121

120. A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances
Published: 12/31/1991
Authors: Michael W Cresswell, Michael Gaitan, Richard A Allen, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=21586



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