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You searched on: Author: richard allen

Displaying records 101 to 110 of 126 records.
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101. Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films
Published: 12/31/1997
Authors: W. F. Lee, William F Guthrie, Michael W. Cresswell, Richard A Allen, J. J. Sniegowski, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3491

102. Hybrid Optical-Electrical Overlay Test Structure
Published: 5/1/1997
Authors: Michael W. Cresswell, Richard A Allen, Loren W. Linholm, William F Guthrie, William B. Penzes, A. W. Gurnell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=23722

103. Critical Dimension Metrology for MEMS Processes Using Electrical Techniques
Published: 12/31/1996
Authors: Richard A Allen, Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=20769

104. Electrical Test Structures Replicated in Silicon-on-Insulator Material
Published: 12/31/1996
Authors: Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, Loren W. Linholm, John S Villarrubia
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8218

105. Hybrid Optical-Electrical Overlay Test Structure
Published: 12/31/1996
Authors: Michael W. Cresswell, Richard A Allen, Loren W. Linholm, William F Guthrie, A. W. Gurnell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=7729

106. Recent Developments in Electrical Linewidth and Overlay Metrology for Integrated Circuit Fabrication Processes
Published: 12/31/1996
Authors: Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, William F Guthrie, A. W. Gurnell, Loren W. Linholm, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27620

107. The Enhanced Voltage-Dividing Potentiometer for High-Precision Feature Placement Metrology
Published: 2/1/1996
Authors: Richard A Allen, Michael W. Cresswell, Colleen E. Hood, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3815

108. Measurement of Patterned Film Linewidth for Interconnect Characterization
Published: 12/31/1995
Authors: Loren W. Linholm, Richard A Allen, Michael W. Cresswell, Rathindra Ghoshtagore, Santos D Mayo, Harry A. Schafft, John A Kramar, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=16737

109. Microelectronic Test Structures for Overlay Metrology
Published: 1/1/1995
Authors: Loren W. Linholm, Richard A Allen, Michael W. Cresswell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8994

110. A New Method to Measure the Distance Between Graduation Lines on Graduated Scales
Published: 12/31/1994
Authors: William B. Penzes, Richard A Allen, Michael W. Cresswell, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28768



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