NIST logo

Publications Portal

You searched on:
Author: richard allen

Displaying records 101 to 110 of 122 records.
Resort by: Date / Title


101. Hybrid Optical-Electrical Overlay Test Structure
Published: 12/31/1996
Authors: Michael W Cresswell, Richard A Allen, Loren W. Linholm, William F Guthrie, A. W. Gurnell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=7729

102. Recent Developments in Electrical Linewidth and Overlay Metrology for Integrated Circuit Fabrication Processes
Published: 12/31/1996
Authors: Michael W Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, William F Guthrie, A. W. Gurnell, Loren W. Linholm, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27620

103. The Enhanced Voltage-Dividing Potentiometer for High-Precision Feature Placement Metrology
Published: 2/1/1996
Authors: Richard A Allen, Michael W Cresswell, Colleen E. Hood, Loren W. Linholm
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3815

104. Measurement of Patterned Film Linewidth for Interconnect Characterization
Published: 12/31/1995
Authors: Loren W. Linholm, Richard A Allen, Michael W Cresswell, Rathindra Ghoshtagore, Santos D Mayo, Harry A. Schafft, John A Kramar, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=16737

105. Microelectronic Test Structures for Overlay Metrology
Published: 1/1/1995
Authors: Loren W. Linholm, Richard A Allen, Michael W Cresswell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8994

106. A New Method to Measure the Distance Between Graduation Lines on Graduated Scales
Published: 12/31/1994
Authors: William B. Penzes, Richard A Allen, Michael W Cresswell, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28768

107. Application of the Modified Voltage-Dividing Potentiometer to Overlay Metrology in a CMOS/Bulk Process
Published: 12/31/1994
Authors: Richard A Allen, Michael W Cresswell, Loren W. Linholm, Jinsheng Wen, Colleen E. Hood, T. A. Hill, J. D. Benecke, S. R. Volk, H. D. Stewart
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=25863

108. Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards
Published: 12/31/1994
Authors: Michael W Cresswell, William B. Penzes, Richard A Allen, Loren W. Linholm, Colleen E. Hood, E Clayton Teague
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27496

109. Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology
Published: 12/31/1994
Authors: Loren W. Linholm, Richard A Allen, Michael W Cresswell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=13045

110. New Test Structure for Nanometer-Level Overlay and Feature-Placement Metrology
Published: 8/1/1994
Authors: Michael W Cresswell, Richard A Allen, Loren W. Linholm, Colleen E. Hood, William B. Penzes
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=10192



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series