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Data
for the Semiconductor and Microelectronics Industries
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NIST
Standard Reference Data Program: Serves science and
industry with world-leading technical data services and products.
This page provides links to scientific databases in several
specialties. |
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Thermophysical
Properties of Gases Used in the Semiconductor Industry:
Generates transport and thermodynamic property data for the
gases used in semiconductor processing to disseminate in an
online database providing heat capacity, thermal conductivity,
viscosity, and other data. Contact: John
Hurly, (301) 975- 2476. |
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Electron
Interactions with Plasma Processing Gases: Contains
electron-collision cross section data and electron transport
coefficients for gases used to manufacture semiconductor devices.
Contact: James Olthoff,
(301) 975-2431. |
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Ceramics
WebBook: Contains evaluated data on the properties of
ceramic materials. Includes guide to other data centers and
sources of materials information. |
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NIST
Chemistry WebBook: Provides easy access to chemical
and physical property data for chemical species; search by name,
formula, author, or structure and retrieve data on reaction,
spectral, thermophysical, and many other properties. |
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Chemical
Kinetics Database: A compilation of kinetics data on
gas-phase reactions, this resource can be searched by specific
reactants, reactions resulting in specific products, all reactions
of a particular species, or combinations of these. Contact:
Robert Huie, (301)
975-2559. |
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Computational
Chemistry Comparison and Benchmark Database: Contains
computational thermochemical data for about 600 gas-phase molecules
as well as tools for comparing experimental and computational
thermochemical properties. |
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Physical
Reference Data: Look up physical constants, atomic and
molecular data, ionization, x-ray, and gamma ray data, nuclear
physics data, and condensed matter physics data. Includes links
to other online NIST reference databases. |
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Web
CKMech: Contains thermochemical data on silicon hydrides,
fluorinated hydrocarbons, chlorinated hydrocarbon. |
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Date
created: 7/13/01
Last updated: 7/13/01
Contact: inquiries@nist.gov
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