semiconductor devices, smaller has always been better.
By the late 1970s it was also clear that such tiny devices
required better measurements for quality control. In
1979, NIST* issued its first semiconductor linewidth
standard-an instant best seller. The new standard reduced
measurement discrepancies among companies tenfold and
saved the industry millions of dollars annually. The
quest for microrulers continues today as NIST works
with industry to extend accurate measurements to the
was known as the National Bureau of Standards for most
of its 100 years.