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MEMS the Word for Micro Tools |
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| This colorized micrograph shows a microrotor similar to those in a minature motor operated by an integrated circuit. NIST is working to develop reliable ways for the semiconductor industry to measure stress, strain, and other mechanical properties to optimize the operation of such MicroElectroMechanical Systems or MEMS. |
| Technology at a Glance (Winter 1995) newsletter article on MEMS |
| IC Technology Group |
| Semiconductor Electronics Division |
| Electronics and Electrical Engineering Laboratory |
| NIST Image Gallery |