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Advanced Measurement Laboratory

Building on Success

For more than 100 years, the National Institute of Standards and Technology (NIST) has developed the measurements and standards necessary for the United States to excel in technology innovation. For example, the telecommunications industry relies on NIST standards for the speed and efficiency of calls relayed on optical fiber. U.S. auto makers and parts manufacturers rely on NIST calibrations, standards, and technology to ensure the quality and reliability of their products. Semiconductor chip makers need an array of NIST measurements to produce ever smaller and faster electronics. AML Building Schematic

To continue to respond to U.S. science and industry’s needs for more sophisticated measurements and standards in the face of heightened global competition, NIST is constructing one of the most technologically advanced facilities in the world—the Advanced Measurement Laboratory, or AML.

In the nearly 40 years since the NIST Gaithersburg, Md., campus was constructed, industry demand for highly accurate measurement standards has grown tremendously. Global economic competition, increasingly advanced communications, and ever more sophisticated technology are driving some of these needs. To meet the demands, researchers at NIST, part of the Commerce Department’s Technology Administration, have developed new ways to more accurately measure, quantify, and calibrate industrially important processes and properties.

Technology for Tomorrow

NIST scientists and engineers can locate and manipulate single atoms on a surface; detect ultratrace amounts of chemical agents; and measure the many optical, physical, and quantum properties of components for telecommunications devices, semiconductor chips, and magnetic recording devices. However, deteriorating conditions in NIST’s older lab facilities currently are limiting the quality, accuracy, and productivity of many of these efforts. When the AML is ready for use by Gaithersburg researchers in 2004, it will dramatically improve NIST’s ability to provide U.S. industry and science with the best measurements and standards in the world.

The AML will provide superior vibration, temperature and humidity control, and air cleanliness. Compared to the existing NIST laboratory buildings, most of which were built in the 1960s, the AML will dramatically reduce vibration to sensitive experiments measuring atomic distances of just a few nanometers (billionths of a meter). Like vibration, temperature fluctuations can disturb the results of very sensitive measurements. Standard AML laboratories will provide temperature control of ± 0.25 degree Celsius with specialized labs providing ± 0.10 degree Celsius and ± 0.01 degree Celsius temperature control to meet the stringent scientific requirements. Air inside the building will be HEPA filtered to provide very good air cleanliness so dust or other stray particles will not foul measurements on atomic-scale devices. A special Class 100 clean room wing will provide air cleanliness needed for more sensitive research.

Humidity control will provide variations of no more than 1 percent in specialized areas and 5 percent throughout the rest of the facility. Certain instruments, measurements, and chemical reactions are extremely sensitive to humidity. The AML also will provide labs with improved electrical power quality. In existing NIST labs, spikes and dips in the voltage and current can affect sensitive measurements adversely. Economic evaluations have concluded that the best way to provide needed air cleanliness, vibration, isolation, electrical power quality, and temperature and humidity control is to build the AML. Retrofitting the existing buildings to AML-quality environmental conditions is not economically feasible.

To achieve the required conditions, the AML consists of five wings, each with one level housing laboratory space and one or two levels for mechanical equipment and environmental controls. Two of the five sections will be completely below ground for improved vibration isolation and temperature control. They will be unaffected by outside temperature variation and vibration induced by the wind. Special isolated concrete slabs will reduce vibration levels even further for NIST’s most demanding research programs.

Once occupied, the AML will house a wide variety of laboratory research from NIST’s technical units. The most sensitive experiments deemed to have the greatest need for special environmental controls and the highest impact have been selected to relocate to the AML. The following are current examples of research that could be done more efficiently and with greater accuracy if conducted in the AML.

Why the Air Must Be Very Clean

A specially designed laboratory within the AML will allow development of NIST Standard Reference Materials for measuring wafer contamination for semiconductor manufacturers. To do this work, scientists need to isolate a field emission analytical electron microscope from dust particles, vibration, magnetic fields, and temperature changes. The microscope must focus on nanometer-scale regions of a semiconductor wafer for an extended period of time. In its current location, the microscope tends to drift away from the area of study in just seconds. Furthermore, poor air quality in the existing labs would ruin any industrial semiconductor samples brought into it. This is because the structures in modern computer chips are so small that a single nanometer-scale contamination particle can cause the whole device to fail. Standard Reference Materials to help semiconductor manufacturers accurately measure contamination of their products ultimately should improve efficiency and quality control for the manufacturers.

When Humidity Hurts

Using precisely tuned lasers to capture and manipulate atoms, NIST researchers have produced some of the coldest matter ever, creating atom clouds with temperatures of less than a millionth of a degree above absolute zero. In addition to winning a Nobel prize for its contribution to understanding the quantum nature of matter, this work is yielding important contributions to the next generation of time and frequency standards, which are essential to communications and navigation. However, present lab conditions slow and complicate this work. Uncontrollable humidity fluctuations degrade the stability and performance of the precision lasers used to focus, trap, and manipulate the tiny clouds of cold atoms. Large vibrations and poor air quality cause further problems, impeding the rate of progress of the research. In the AML, these problems essentially will be eliminated.

When Vibrations Aren’t Good

NIST researchers are using ultra-fast laser pulses to probe chemical reactions at surfaces of metals, silicon, and other advanced materials. These studies could lead to more efficient ways to catalyze chemical reactions for more efficient chemical production or build nanoscale structures for faster, more powerful electronic components. Temperature and humidity changes, electric current stability, air particles, and vibration can force researchers to scrap their results and start over. The experiments are conducted with very fast laser pulses measured in femtoseconds (quadrillionths of a second). Since light travels 0.3 millionths of a meter in one femtosecond, the 1.5 meter by 3 meter table holding the laser and related optics must vibrate no more than 0.3 millionths of a meter. In its current location, the femtosecond laser equipment is stable for no more than one hour. Sections of the AML with the least vibration will meet the environmental requirements for these kinds of experiments.

Changing Temperature Hampers Accuracy

Challenged to produce parts with ever more complex features within ever finer tolerances, manufacturers use coordinate measuring machines (CMMs) to inspect the dimensions of manufactured gears and other machine parts. About 30,000 CMMs are employed in U.S. factories and laboratories. NIST provides industry with several measurement tools and services to ensure the accuracy of CMM measurements. NIST efforts to improve the accuracy of CMM measurements have been plagued with problems due to poor air quality, humidity, and vibration. CMMs are particularly sensitive to temperature. Calibrating the artifacts that industry uses to check the accuracy of its own CMMs requires a very stable temperature for the duration of a series of complex measurements to achieve the desired accuracy. Even heat from a person standing near the CMM will cause the metal to expand slightly, enough to alter the accuracy of a CMM calibration. The AML would provide 10 times better temperature control as well as improved air quality and vibration and humidity control.

AML Specifications

  • 47,480 square meters, or 511,070 square feet total
  • Cost: $235.2 million
  • Occupancy expected in FY 2004
  • 2 single-floor metrology laboratory sections completely below grade with 151 lab modules
  • 2 single-floor instrument laboratory sections above ground with 187 lab modules
  • 1 above ground Class 100 clean room wing (3.5 or fewer particles per liter), upgradable to Class 10
  • Baseline temperature control to within ±0.25 degree Celsius
  • Temperature control to within ±0.1 or ±0.01 degree Celsius for 48 precision temperature control laboratories in metrology sections
  • Several types of vibration isolation foundations in metrology laboratory sections for a velocity amplitude of 3 micrometers per second or less
  • Humidity control to within 1 percent in special metrology laboratory sections and 5 percent in the rest of the facility
  • Building-wide conditioned power supply system that will meet IEEE Std. 1100-1992 for critical electronic loads
  • Ceiling heights in laboratory modules adaptable to 7 meters (22 feet)
  • Natural daylighting, energy conservation, and recycling incorporated into the AML’s design and planned operation

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Date created: 08/21/02
Last updated: 08/21/02
Contact: inquiries@nist.gov

 

 

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