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Making
good pressure measurements from ultra-high vacuum to atmospheric
pressure requires the correct use of many kinds of gauges. Among
the most widely used are ionization gauges, spinning rotor gauges,
thermal conductivity gauges, capacitance diaphragm gauges, quartz
bourdon tube gauges, and resonant silicon gauges. However, the
incorrect use of any of these gauges can result in bad measurements
that cost time and money.
This two-day course will cover the fundamentals of pressure measurements
from 10-8 Pa to 10+5 Pa (10-10 torr to 10+3 torr), focusing on
the selection and proper use of appropriate gauging technology
for a given application. A survey of calibration techniques will
be presented along with recommendations for obtaining best performance.
A small vacuum system will be set up for a live demonstration
of some of the gauges discussed in the course. Attendees are invited
to share their own pressure measurement problems for in-class
discussion.
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